Mapping and Imaging of Thin Films on Large Surfaces

Reactive (Ar-O2 plasma) magnetron sputtered WO3-MoO3 (nanometer scaled) mixed layers were investigated and mapped by Spectroscopic Ellipsometry (SE). The W- and Mo-targets were placed separately, and 30 × 30 cm glass substrates were slowly moved under the two (W and Mo) separated targets. We used different (oscillator- and Effective Medium Approximation, EMA-based) optical models to obtain the thickness and composition maps of the sample layer relatively quickly and in a cost-effective and contactless way. In addition, we used Rutherford Backscattering Spectrometry to check the SE results. Herein, we compare the “goodness” of different optical models depending upon the sample preparation conditions, for instance, the speed and cycle number of the substrate motion. Finally, we can choose between appropriate optical models (2-Tauc-Lorentz oscillator model vs. the Bruggeman Effective Medium Approximation, BEMA) depending on the process parameters. If one has more than one “molecular layer” in the “sublayers”, BEMA can be used. If one has an atomic mixture, the multiple oscillator model is better (more precise) for this type of layer structure.

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“…One can find a good summary regarding the “Mapping and imaging of thin films on large surfaces” in [ 19 ].…”

Section: Resultsmentioning

confidence: 99%

Investigation of Combinatorial WO3-MoO3 Mixed Layers by Spectroscopic Ellipsometry Using Different Optical Models

et al. 2022

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“…The optical mapping [ 21 ] was performed using Woollam M2000 SE, and the measurements were evaluated with the CompleteEASE v. 5.15 software [ 26 ]. To obtain the mapping parameters, oscillator functions and compact optical models were used.…”

Section: Methodsmentioning

confidence: 99%

“…Many researchers have used SE for pure or combinatorial material investigation [ 14 , 15 , 16 , 17 , 18 , 19 , 20 , 21 ]. The combinatorial approach used to investigate mixed metal oxides has several advantages.…”

Section: Introductionmentioning

confidence: 99%

Investigation of Electrochromic, Combinatorial TiO2-SnO2 Mixed Layers by Spectroscopic Ellipsometry Using Different Optical Models

et al. 2023

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We determined the optimal composition of reactive magnetron-sputtered mixed layers of Titanium oxide and Tin oxide (TiO2-SnO2) for electrochromic purposes. We determined and mapped the composition and optical parameters using Spectroscopic Ellipsometry (SE). Ti and Sn targets were put separately from each other, and the Si-wafers on a glass substrate (30 cm × 30 cm) were moved under the two separated targets (Ti and Sn) in a reactive Argon-Oxygen (Ar-O2) gas mixture. Different optical models, such as the Bruggeman Effective Medium Approximation (BEMA) or the 2-Tauc–Lorentz multiple oscillator model (2T–L), were used to obtain the thickness and composition maps of the sample. Scanning Electron Microscopy (SEM) with Energy-Dispersive X-ray Spectroscopy (EDS) has been used to check the SE results. The performance of diverse optical models has been compared. We show that in the case of molecular-level mixed layers, 2T–L is better than EMA. The electrochromic effectiveness (the change of light absorption for the same electric charge) of mixed metal oxides (TiO2-SnO2) that are deposited by reactive sputtering has been mapped too.

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“…A conventional spectroscopic ellipsometer typically modulates the polarization state via mechanical rotation of the compensator or analyzer 8 – 10 , which may result in a large size and its sensitivity to mechanical vibration noise. To realize polarization modulation without moving parts, one may resort to photoelastic or electro-optic effects 11 .…”

Section: Introductionmentioning

confidence: 99%

Metasurface array for single-shot spectroscopic ellipsometry

Wen,

Xue,

Wang

et al. 2024

Light Sci Appl

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Spectroscopic ellipsometry is a potent method that is widely adopted for the measurement of thin film thickness and refractive index. Most conventional ellipsometers utilize mechanically rotating polarizers and grating-based spectrometers for spectropolarimetric detection. Here, we demonstrated a compact metasurface array-based spectroscopic ellipsometry system that allows single-shot spectropolarimetric detection and accurate determination of thin film properties without any mechanical movement. The silicon-based metasurface array with a highly anisotropic and diverse spectral response is combined with iterative optimization to reconstruct the full Stokes polarization spectrum of the light reflected by the thin film with high fidelity. Subsequently, the film thickness and refractive index can be determined by fitting the measurement results to a proper material model with high accuracy. Our approach opens up a new pathway towards a compact and robust spectroscopic ellipsometry system for the high throughput measurement of thin film properties.

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Mapping and Imaging of Thin Films on Large Surfaces

Cited by 8 publications

References 53 publications

Investigation of Combinatorial WO3-MoO3 Mixed Layers by Spectroscopic Ellipsometry Using Different Optical Models

Investigation of Combinatorial WO3-MoO3 Mixed Layers by Spectroscopic Ellipsometry Using Different Optical Models

Investigation of Electrochromic, Combinatorial TiO2-SnO2 Mixed Layers by Spectroscopic Ellipsometry Using Different Optical Models

Metasurface array for single-shot spectroscopic ellipsometry

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