Marker Pen Lithography for Flexible and Curvilinear On‐Chip Energy Storage

Abstract

wileyonlinelibrary.comcarbon have been explored in fabricating MSCs. [7][8][9][10][11] For example, activated, [ 7 ] carbide derived, [ 8 ] onion-like carbon, [ 9 ] graphene [ 10 ] and carbon nanotubes (CNTs) [ 11 ] have been patterned employing conventional photolithography and various deposition methods such as sputtering, ink-jet printing, electrophoretic, and chemical vapor deposition (CVD). Furthermore, several pseudocapacitive materials including transition metal oxides (RuO 2 , MnO 2 ), [ 12,13 ] hydroxides (Ni(OH) 2 ), [ 14 ] and conducting polymers (polyaniline, polypyrrole and PEDOT) [15][16][17][18] have also been employed in fabricating MSCs. However, most of the reported methods involving conventional photolithography techniques which involve use of masks in a typical microfabrication protocol operated in a cleanroom environment. [7][8][9][10][11][12][13][14][15][16][17][18] In order to avoid multistep processing, complex and costly fabrication equipment, direct write innovative methods have been proposed in fabricating carbon-based MSCs. For example, laser source was used to fabricate reduced graphene oxide (rGO) MSCs by reducing graphene oxide (GO) locally. [ 19 ] EI-Kady and Kaner have demonstrated scalable fabrication of rGO MSCs by ordinary digital video disk (DVD) laser scribing technique. [ 20 ] Recently, laser-induced graphitization was employed to transform commercial polymer substrate into 3D porous graphene fi lms for fabricating MSCs in a direct manner. [ 21 ] Printing techniques such as ink-jet printing and laser printing technologies were employed to fabricate conducting polymer-based MSCs. [ 22,23 ] Though these direct write methods have lower resolution (width and spacing between the fi ngers is on the order of 0.5-1 mm) than conventional photolithography-based methods, the performance of devices fabricated using these direct-write methods seems to be comparable to that of state-of-the-art thin fi lm-based energy storage devices. However, most of the direct write techniques have been focused on fabricating carbon-based MSCs. Therefore, it is highly desirable to develop a versatile strategy in fabricating pseudocapacitive microsupercapacitors on rigid, fl exible, and even curved surfaces without the need of masks, complex processing, or a cleanroom environment.Pen is a simple, yet universal, tool that has been commonly used for writing text or drawing designs on a variety of surfaces over the years. Different types of pens can be categorized based on writing tip or point, namely ball point, roller ball, fountain, and marker. Commercially available inks can be a On-chip energy storage using microsupercapacitors can serve the dual role of supplementing batteries for pulse power delivery, and replacement of bulky electrolytic capacitors in ac-line fi ltering applications. Despite complexity and processing costs, microfabrication techniques are being employed in fabricating a great variety of microsupercapacitor devices. Here, a simple, cost-effective, and versatile strategy is proposed to...

All-MXene (2D titanium carbide) solid-state microsupercapacitors for on-chip energy storage

“…29 Further improvement in MSC performance can be reached upon optimization of MXene flake size, thickness, composition, and the architecture of MXene-based MSC devices. 8,10 , and carbon 7-10, 13, 16-18, 25, 57 , metal oxide 20,21,25,59 , or conducting polymer-based 60,61 MSCs.…”

MXene‐on‐Paper Coplanar Microsupercapacitors

“…[4,5] Such architecture can also be simply integrated on the same substrate as other electronic components such as sensors or rectifiers. Furthermore, pseudocapacitive materials which store charge through fast surface redox reactions such as metal oxides, [11] hydroxides, [12] sulfides, [13] and conducting polymers [14] were employed to fabricate micropseudocapacitors. [1,4] For example, various carbonaceous materials including activated carbon, [6] onionlike carbon [7] carbide-derived carbons, [8] carbon nanotubes, [9] and graphene [10] were employed to demonstrate state-of-theart electrical double layer type capacitors.…”

“…However, most of the efforts have been focused on fabricating microsupercapacitors on rigid and flexible substrates employing conventional microfabrication techniques. [14][15][16] Attempts have been made to use graphite in pencils and inks for writing electrodes on paper. Furthermore, pseudocapacitive materials which store charge through fast surface redox reactions such as metal oxides, [11] hydroxides, [12] sulfides, [13] and conducting polymers [14] were employed to fabricate micropseudocapacitors.…”

“…[14][15][16] Attempts have been made to use graphite in pencils and inks for writing electrodes on paper. [14][15][16] Attempts have been made to use graphite in pencils and inks for writing electrodes on paper.…”

A Highly Durable, Transferable, and Substrate‐Versatile High‐Performance All‐Polymer Micro‐Supercapacitor with Plug‐and‐Play Function

“…[1] On the other hand, the microfabrication technology opens up the possibilities for fabrication of microenergy-storage-devices with planar interdigitated structure. [20][21][22][23][24][25] Conductive polymers after being doped, advantageous to other pseudocapacitive materials (metal oxides), [26,27] offer low cost, high conductivity, lightweight, and excellent flexibility. Although these μSCs show excellent energy-storage performance (e.g., excellent power density and long cycle life) and great feasibility to be integrated to miniaturized devices, the usage scenarios are still limited due to the following disadvantages.…”