2010
DOI: 10.1117/12.865509
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Mask industry assessment trend analysis: 2010

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“…The results from those past surveys were published as SPIE papers and presented at BACUS, where they were found to provide valuable insights for both mask makers and mask users. 2,3 From 2002 to 2011, the survey questions remained essentially constant [4][5][6][7][8][9][10][11][12][13][14][15] . Questions are grouped into six categories: General Business Profile Information, Data Processing, Yields and Yield Loss Mechanisms, Delivery Time, Returns, and Services.…”
Section: Introductionmentioning
confidence: 99%
“…The results from those past surveys were published as SPIE papers and presented at BACUS, where they were found to provide valuable insights for both mask makers and mask users. 2,3 From 2002 to 2011, the survey questions remained essentially constant [4][5][6][7][8][9][10][11][12][13][14][15] . Questions are grouped into six categories: General Business Profile Information, Data Processing, Yields and Yield Loss Mechanisms, Delivery Time, Returns, and Services.…”
Section: Introductionmentioning
confidence: 99%