Maskless photolithography: Embossed photoresist as its own optical element

Paul, Kateri E.; Breen, Tricia L.; Aizenberg, Joanna; Whitesides, George M.

doi:10.1063/1.122621

Cited by 62 publications

(35 citation statements)

References 8 publications

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“…Most methods for 3D microfabrication are based on photolithography (30,64). A number of techniques (some very clever but none very simple or easily extended to the parallel fabrication of very large numbers of components) have been used to convert 100-m-scale two-dimensional structures produced by photolithography into 3D structures (65)(66)(67)(68). The most versatile of these at present seems to be self-folding, which is another form of self-assembly.…”

Section: Components For Self-assemblymentioning

confidence: 99%

Beyond molecules: Self-assembly of mesoscopic and macroscopic components

Whitesides

Boncheva²

2002

Proc. Natl. Acad. Sci. U.S.A.

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Self-assembly is a process in which components, either separate or linked, spontaneously form ordered aggregates. Self-assembly can occur with components having sizes from the molecular to the macroscopic, provided that appropriate conditions are met. Although much of the work in self-assembly has focused on molecular components, many of the most interesting applications of self-assembling processes can be found at larger sizes (nanometers to micrometers). These larger systems also offer a level of control over the characteristics of the components and over the interactions among them that makes fundamental investigations especially tractable.

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Section: Components For Self-assemblymentioning

confidence: 99%

Beyond molecules: Self-assembly of mesoscopic and macroscopic components

Whitesides

Boncheva²

2002

Proc. Natl. Acad. Sci. U.S.A.

Self Cite

1,450

1,045

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“…Many studies are devoted to fabricate surface topographies by wrinkling, [11][12][13][14] lithography [15] or embossing [16][17][18][19]. A number of groups [20][21][22][23] have demonstrated the generation of surface relief gratings in thin films by using azobenzene-containing polymers.…”

Section: Introductionmentioning

confidence: 99%

Volume generation towards dynamic surface morphing in liquid crystal polymer networks

Liu

2016

Liquid Crystals

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Thin coatings based on liquid crystal networks (LCNs) modified with azobenzene moieties are able to create dynamic surface topographies in the micrometre range by exposure with UV light. The surface corrugations can be erased and restored by switching 'off' and 'on' the UV illumination. Various configurations were presented. The formation of the protrusions was proven to be induced mainly by excessive volume formation when the order in the LCNs is reduced. It is suggested that this extra volume formation can be further enhanced by stimulating the oscillatory dynamics of trans-cis and cis-trans isomerisation. Therefore, dual-wavelength exposure not only exciting the trans state of azobenzene by 365 nm UV light but simultaneously also the cis state by 455 nm blue light was shown to enhance the effect. ARTICLE HISTORY

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“…This idea can be extended to both two and three dimensions using a range of fabrication techniques. [13][14][15][16][17] There is currently much interest in the application of two-dimensional microstructuring to a variety of optical systems, such as providing in-plane confinement of certain microcavity modes, 18 complete band gaps for surface modes, 19 enhanced light extraction and out-of-plane scattering of guided modes, [20][21][22] and feedback for organic microcavity lasers. 23 In this paper, surface microstructuring 24 is used to provide band gaps for the guided modes of microcavities based on metallic mirrors.…”

Section: Introductionmentioning

confidence: 99%

Flat photonic bands in guided modes of textured metallic microcavities

Salt

Barnes

2000

Phys. Rev. B

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A detailed experimental study of how wavelength-scale periodic texture modifies the dispersion of the guided modes of /2 metal-clad microcavities is presented. We first examine the case of a solid-state microcavity textured with a single, periodic corrugation. We explore how the depth of the corrugation and the waveguide thickness affect the width of the band gap produced in the dispersion of the guided modes by Bragg scattering off the periodic structure. We demonstrate that the majority of the corrugation depths studied dramatically modify the dispersion of the lowest-order cavity mode to produce a series of substantially flat bands. From measurements of how the central frequency of the band gap varies with direction of propagation of the guided modes, we determine a suitable two-dimensional texture profile for the production of a complete band gap in all directions of propagation. We then experimentally examine band gaps produced in the guided modes of such a two-dimensionally textured microcavity and demonstrate the existence of a complete band gap for all directions of propagation of the lowest-order TE-polarized mode. We compare our experimental results with those from a theoretical model and find good agreement. Implications of these results for emissive microcavity devices such as light-emitting diodes are discussed.

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Maskless photolithography: Embossed photoresist as its own optical element

Cited by 62 publications

References 8 publications

Beyond molecules: Self-assembly of mesoscopic and macroscopic components

Beyond molecules: Self-assembly of mesoscopic and macroscopic components

Volume generation towards dynamic surface morphing in liquid crystal polymer networks

Flat photonic bands in guided modes of textured metallic microcavities

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