2008
DOI: 10.1039/b800465j
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Maskless photolithography using UV LEDs

Abstract: A UV light emitting diode (LED) with a maximum output of 372 nm was collimated using a pinhole and a small plastic tube and focused using a microscope objective onto a substrate for direct lithographic patterning of the photoresist. Movement of the substrate with a motorised linear stage (syringe pump) allowed lines in SU-8 to be pattered with a width down to 35 lm at a linear velocity of 80 lm s −1 , while in the dry film resist Ordyl SY 330, features as narrow as 17 lm were made at a linear velocity of 245 l… Show more

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Cited by 51 publications
(30 citation statements)
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“…[ 59 ] Rapid microfl uidic chip prototypes are produced with maskless photolithography using a liquid crystal display projector to pattern photoresist [ 60 ] and direct lithographic patterning of photoresist using a collimated and focused ultraviolet light emitting diode. [ 61 ] Cleanroom environments for microfabrication are not always available. For this reason, several approaches have been proposed to fabricate microfl uidic devices using minimal infrastructure for research prototyping.…”
Section: Progress Reportmentioning
confidence: 99%
“…[ 59 ] Rapid microfl uidic chip prototypes are produced with maskless photolithography using a liquid crystal display projector to pattern photoresist [ 60 ] and direct lithographic patterning of photoresist using a collimated and focused ultraviolet light emitting diode. [ 61 ] Cleanroom environments for microfabrication are not always available. For this reason, several approaches have been proposed to fabricate microfl uidic devices using minimal infrastructure for research prototyping.…”
Section: Progress Reportmentioning
confidence: 99%
“…UV LEDs have been used as a substitute exposure source for direct writing lithography (Guijt and Breadmore 2008), however, this approach is not optimal for the design of microfluidic devices with complex structural and functional features, and still costs at least US$6000. Another method is patterning paper-based microfluidic devices by using a UV lamp, but the features are limited by more than 200 lm wide (Martinez et al 2008).…”
Section: Introductionmentioning
confidence: 99%
“…5,6) Then, maskless lithography appeared, where patterns were created by light reflection either from analog or digital mirrors. [7][8][9][10] Direct synthesis of DNA on a platform is important because today real-time PCR and DNA microarrays are the most commonly used molecular diagnostics tools for in-vitro diagnosis (IVD). With the real-time PCR, one can determine the amount of viral particles in blood and quantitatively analyze the number of DNA in samples.…”
Section: Introductionmentioning
confidence: 99%