1989
DOI: 10.1088/0022-3735/22/8/027
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Mass analyser optics for wide-beam ion sources in ion implantation systems

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“…The fundamental components of a beam transport system are: Quadrupoles, bending magnets, and field-free drift regions. The quadrupole function is to focus, while the electrostatic and magnetic bends function is to provide guiding and focusing [10].…”
Section: Guiding and Focusing Systemmentioning
confidence: 99%
“…The fundamental components of a beam transport system are: Quadrupoles, bending magnets, and field-free drift regions. The quadrupole function is to focus, while the electrostatic and magnetic bends function is to provide guiding and focusing [10].…”
Section: Guiding and Focusing Systemmentioning
confidence: 99%