The recent proliferation
of SmallSats and their use in increasingly
demanding applications require the development of onboard electric
propulsion compatible with the power, mass, and volume constraints
of these spacecraft. Electrospray propulsion is a promising technology
for SmallSats due to its unique high efficiency and scalability across
the wide power range of these platforms, for example, from a few watts
available in a CubeSat to a few hundred watts in a MiniSat. The implementation
of electrospray propulsion requires the use of microfabrication techniques
to create compact arrays of thousands of electrospray emitters. This
article demonstrates the microfabrication of multi-emitter electrospray
sources of a scalable size for electrospray propulsion. In particular,
a microfabrication and assembly process is developed and demonstrated
by fabricating sources with arrays of 1, 64, and 256 emitters. The
electrospray sources are tested in a relevant environment for space
propulsion (inside a vacuum chamber), exhibiting excellent propulsive
performance (e.g., absence of beam impingement in the extractor electrode,
absence of hysteresis in the beam current versus propellant flow rate
characteristic, proper operation in the cone-jet electrospraying mode,
etc.) and nearly coincident output per emitter. Several design elements
contribute to this performance: the even distribution of the propellant
among all emitters made possible by the implementation of a network
of microfluidic channels in the backside of the emitter array; the
small dead volume of the network of microfluidic channels; the accurate
alignment between the emitters and extractor orifices; and the use
of a pipe-flow configuration to drive the propellant through closed
conduits, which protects the propellant.