Mass Production of Large-Format Micro-/Nanostructure-Based Optical Devices

Color-Selective and Versatile Light Steering with up-Scalable Subwavelength Planar Optics

“…22,23,26−28 Moreover, none of these structures are compatible with very high-throughput fabrication techniques such as roll-to-roll nanoimprint lithography (NIL) replication, 29 a requirement for many applications, such as optical security devices, 30 where cost-effective processes are mandatory. 31 Resonant waveguide gratings (RWGs) are structures that have been industrialized at very large volumes. 32 RWGs were systematically analyzed in the 1990s.…”

“…Recently, metasurfaces (i.e., optically thin arrays of subwavelength spaced resonators) , have been created to steer and focus light, − working in the visible range (390–750 nm) or in part of it. − The fabrication of these structures also requires high quality and low throughput ebeam lithography, making the realization of large samples very time-consuming. A few of the proposed metasurfaces are compatible with medium to high-throughput wafer-scale production techniques like steppers or those used in silicon technology. ,,− Moreover, none of these structures are compatible with very high-throughput fabrication techniques such as roll-to-roll nanoimprint lithography (NIL) replication, a requirement for many applications, such as optical security devices, where cost-effective processes are mandatory . Resonant waveguide gratings (RWGs) are structures that have been industrialized at very large volumes .…”