Highly ordered arrays of periodic nanostructures [1] show interesting characteristics for applications in photonics, [2] electronics, [3] optoelectronics, [4] sensing, [5] biochips, [6] and catalysis. [7] The array properties are determined by the choice of material and can be tuned further by varying the geometry, chemical composition, periodicity, and the size of the nanostructures. [4,8] Such controlled and elaborate arrays are commonly fabricated by X-ray or electron-beam lithography. However, there are limitations to patterning over large areas using these lithographical techniques due to long processing times, which result in higher costs. Relatively simple and costeffective nanopatterning processes have been developed to address these inherent limitations, including interference lithography, [9] nanosphere lithography, [10] and soft lithography. [11] In order to pattern metals or metal oxides, however, the non-conventional methods still require multistep processing as does conventional photoresist lithography. In this paper, we demonstrate a novel but simple methodology for the fabrication of periodic structures comprising metal oxides at the sub-100 nm scale using polymeric templates, colloids, and common laboratory equipment. Thus, this nanopatterning technique does not require high-vacuum deposition, etching, or photoresists, which are common in other processes. The patterns produced with this method were periodic and composed of 1D or 2D arrays of nanostructures over large areas. Fabrication of these metal oxide nanostructures required only a few hours once the nanometer-sized colloid of the metal oxide and polymeric templates were available. The structural resolution of the resulting pattern was determined by the amount of colloidal deposition onto the grooves (or grating) of the templates used. Although this process utilized microstructured templates, it is possible to fabricate features of metal oxide at the 100 nm scale. The geometry and periodicity of the structure can be well defined and controlled through selection from a wide variety of polymeric templates fabricated by numerous techniques. This unique strategy to achieve controlled nanopatterning can utilize a wide variety of inorganic colloids and/or intricate templates (or masks) available from various established lithographic methods. Microstructured polymeric templates have been prepared using a single-step holographic patterning process by exposing films of azobenzene-functionalized polymers (AFPs) on substrates to an argon-ion laser (488 nm) interference pattern. [12] The interference pattern produced photoinduced mass transfer in the polymer film giving rise to a surface-relief structure without additional processing.[13] Such surface modulation leads to 1D or 2D periodic arrays of surface-relief-grating (SRG) structures on the polymeric films. A variety of holographic surface structures can be designed and fabricated with good control over the modulation and periodicity of the patterns. In this work, SRG structures from thin films of ...