2011
DOI: 10.1063/1.3605543
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Mass spectrometric investigation of high-mass neutral species in the downstream region of Ar/CH4 plasmas

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Cited by 2 publications
(1 citation statement)
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“…After silane-containing plasmas, nucleation in carbon-containing plasmas has received the most attention in the literature. A number of studies have explored nanoparticle formation in nonthermal hydrocarbon plasmas. , Mao et al presented a detailed comparison of experiments and numerical modeling for cluster formation in a nonthermal acetylene plasma . As in the case of silane plasmas, they concluded that cluster growth proceeded mainly through sequential anion-neutral reactions, initiated by electron attachment to C 2 H 2 to form the vinylidene anion (H 2 CC – ).…”
Section: Fundamentals Of Nonthermal Plasmasmentioning
confidence: 99%
“…After silane-containing plasmas, nucleation in carbon-containing plasmas has received the most attention in the literature. A number of studies have explored nanoparticle formation in nonthermal hydrocarbon plasmas. , Mao et al presented a detailed comparison of experiments and numerical modeling for cluster formation in a nonthermal acetylene plasma . As in the case of silane plasmas, they concluded that cluster growth proceeded mainly through sequential anion-neutral reactions, initiated by electron attachment to C 2 H 2 to form the vinylidene anion (H 2 CC – ).…”
Section: Fundamentals Of Nonthermal Plasmasmentioning
confidence: 99%