Mass Spectrometric Investigations on Aluminum Isopropoxide Containing Plasmas

Niemietz, Stefan; Fröhlich, Maik; Kersten, Holger

doi:10.1002/ppap.201200012

Cited by 2 publications

(10 citation statements)

References 25 publications

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“…In an Ar/ATI RF-plasma, the main fragmentation process can be supposed to be initiated by electron collision. As a first consequence, the ATI molecule is split forming the fragments CH 3 and H [6]. The remaining parts of an ATI molecule undergoes further electron collisions leading to the direct formation of CO. Figure 16 shows a schematic scheme of the ATI structure.…”

Section: Wwwcpp-journalorgmentioning

confidence: 99%

“…Generally, methyl groups can be considered to be detached from ATI molecules [6,17] which react with hydrogen or other radicals containing carbon and hydrogen, forming C n H m molecules in several steps. The following general formation processes are discussed in literature [6]:…”

Section: By-product Formation As a Function Of The Mixing Ratio Expementioning

confidence: 99%

“…, S AT I = 9 (monomeric ATI) for the carbon content and n By−product denotes the concentration of a by-product. The conversion efficiency, C E , to plasma product molecules is expressed analogously to [22,23] as (6) where n molecules is the number of produced molecules of a certain species (molecules cm −3 ), Φ tot is the total gas flow (cm 3 min −1 ), p is the total pressure and P P lasma is the total plasma power (J s −1 ). The applied FTIR spectroscopy is a line-of-sight method.…”

Section: Definitions Of Analysis Parametersmentioning

confidence: 99%

“…The authors used mass spectrometry to determine the components of hot ATI gas. One of their results was that ATI consists of different types of species characterised by the formula (Al(OC 3 H 7 ) 3 ) x , where x ranges from 1 to 7 [6]. Folting et al carried out X-ray diffraction studies of solid ATI in the 1990s to determine crystal structure and bond lengths [7].…”

Section: Introductionmentioning

confidence: 97%

“…Previous work has been done by Niemietz and co-workers and Lopatik et al getting first information about chemical phenomena in ATI containing plasmas by using mass spectrometry (MS) and quantum cascade laser absorption spectroscopy (QCLAS), respectively [6,17]. However, for mass spectroscopy extracting gas samples from the active plasma region, chemical reactions, especially those including radicals, might adulterate the measured number densities.…”

Section: Introductionmentioning

confidence: 98%

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On the Plasma Chemistry of an RF Discharge Containing Aluminium Tri‐Isopropoxide Studied by FTIR Spectroscopy

Hübner¹,

Fröhlich²,

Tawidian³

et al. 2014

Contrib. Plasma Phys.

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International audienceIn Ar and Ar/N2 radio frequency (RF) discharges with admixtures of aluminium tri-isopropoxide (ATI) the fragmentation of this metal-organic precursor was studied by means of Fourier Transform Infrared (FTIR) spectroscopy using an optical long path cell providing an optical length of l= 17.2 m. The experiments were performed in an asymmetric capacitively coupled process plasma at a frequency of f= 13.56 MHz and at pressure values in the range of p= 1 - 10.5 Pa. The discharge power was chosen between P= 10 - 100 W. Using FTIR spectroscopy the evolution of the concentrations of ATI and of six stable molecules, CH4, C2H2, C2H4, C2H6, CO and HCN, was monitored under flowing conditions at gas flows of Φtotal= 0.5 - 14.5 sccm in the discharge. The concentrations of the reaction products were measured to be between 2 x 1012 molecules cm−3 as e.g. found for C2H4 and C2H6, and 5 x 1013 molecules cm−3, as e.g. in the case of CO. In the plasma a complete dissociation of the precursor ATI was found at a power value of about P= 80 W independent on the admixture of Ar or N2. The fragmentation efficiency (FE) of the reaction products which originate from the ATI molecules ranges between 0.2 and 4 x 1016 molecules J−1 while the fragmentation rate (FR) reached up to 2.5 x 1018 molecules s−1. The multi component detection ability of the spectrometer served to analyse the carbon balance of the by-product formation. For all experiments, the carbon balance never exceeded 25%. Therefore, in the plasmas the majority of the provided carbon is most likely deposited at the reactor walls or forms dust particles or higher molecular CxHy. The conversion efficiencies (CE) of the produced molecular species ranges between 0.1 x 1015 molecules J−1 for C2H4 and 5 x 1015 molecules J−1 for C2H6 depending on the discharge conditions of the RF plasma

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Section: Wwwcpp-journalorgmentioning

confidence: 99%

Section: By-product Formation As a Function Of The Mixing Ratio Expementioning

confidence: 99%

Section: Definitions Of Analysis Parametersmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 97%

Section: Introductionmentioning

confidence: 98%

See 3 more Smart Citations

On the Plasma Chemistry of an RF Discharge Containing Aluminium Tri‐Isopropoxide Studied by FTIR Spectroscopy

Hübner¹,

Fröhlich²,

Tawidian³

et al. 2014

Contrib. Plasma Phys.

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Plasma Chemical Study of a RF Discharge Containing Aluminum Tri‐Isopropoxide Using MIR Absorption Spectroscopy Based on External‐Cavity Quantum Cascade Lasers

Lopatik

Niemietz²,

Fröhlich³

et al. 2012

Contrib. Plasma Phys.

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In Ar and Ar/N 2 RF plasmas with admixtures of aluminum tri-isopropoxide (ATI) the fragmentation of this metal-organic precursor has been studied by means of infrared absorption spectroscopy (IR-AS) using an external-cavity quantum cascade laser (EC-QCL) arrangement. The experiments were performed in an asymmetric capacitively coupled reactor at a frequency of f = 13.56 MHz and a pressure of up to p = 10 Pa. The discharge power was in the range of P = 40 -100 W. Using EC-QCLAS the evolution of the concentrations of six stable molecules, CH4, C2H2, C2H4, H2O, HCN and HNO3, has been monitored in the plasma. The concentrations of these plasma chemical products were found to be in the range of about 7×10 12 -2×10 14 molecules cm −3 .

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Mass Spectrometric Investigations on Aluminum Isopropoxide Containing Plasmas

Cited by 2 publications

References 25 publications

On the Plasma Chemistry of an RF Discharge Containing Aluminium Tri‐Isopropoxide Studied by FTIR Spectroscopy

On the Plasma Chemistry of an RF Discharge Containing Aluminium Tri‐Isopropoxide Studied by FTIR Spectroscopy

Plasma Chemical Study of a RF Discharge Containing Aluminum Tri‐Isopropoxide Using MIR Absorption Spectroscopy Based on External‐Cavity Quantum Cascade Lasers

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