2005
DOI: 10.1016/j.vacuum.2005.01.032
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Mass spectrometric study of ion/molecule reaction in methane and ammonia mixtures

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Cited by 8 publications
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“…22 These ions were reacted with neutral CH 4 and NH 3 to form the secondary ions, and they were further ionized, dissociated, and/or reacted with each other to form other ions. 22 Figure 1 shows the results of OES spectra for different NH 3 /CH 4 ratios.…”
Section: Resultsmentioning
confidence: 99%
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“…22 These ions were reacted with neutral CH 4 and NH 3 to form the secondary ions, and they were further ionized, dissociated, and/or reacted with each other to form other ions. 22 Figure 1 shows the results of OES spectra for different NH 3 /CH 4 ratios.…”
Section: Resultsmentioning
confidence: 99%
“…Plasma diagnostics.-It was reported that as CH 4 and NH 3 were ionized by energetic electrons, the primary ions CH 4+ , CH 3+ , CH 2+ , and NH 3+ , NH 2+ , NH + were produced. 22 These ions were reacted with neutral CH 4 and NH 3 to form the secondary ions, and they were further ionized, dissociated, and/or reacted with each other to form other ions. 22 Figure 1 shows the results of OES spectra for different NH 3 /CH 4 ratios.…”
Section: Resultsmentioning
confidence: 99%
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