A study of the thermal behavior of Ti(dpm) 2 (O i Pr) 2 , used as a source compound to obtain TiO 2 films, was carried out. Ti(dpm) 2 (O i Pr) 2 was synthesized by an original technique. Data on vapor pressure and composition, thermal stability, and decomposition products of the compound were obtained, both in vacuo and in the presence of oxygen. A mechanism is suggested for the thermal decomposition of a vapor on a hot surface.