Mass spectrometry and in situ x-ray photoelectron spectroscopy investigations of organometallic species induced by the etching of germanium, antimony and selenium in a methane-based plasma
T Meyer,
A Girard,
M Bouška
et al.
Abstract:Organometallic positive ions were identified in Inductively Coupled Plasmas by means of Mass Spectrometry (MS) during the etching of Ge, Sb, Se materials. A preliminary study was focused on identifying MxHy+ (M = Ge, Sb, Se) positive ion clusters during a H2/Ar etching process. The methane addition to the H2/Ar mixture generates CHxreactive neutral species. The latter react with the metalloids within gas phase to form MxCyHz+ organometallic ions. In addition, the etching of Sb2Se3 and Ge19.5Sb17.8Se62.7 bulk t… Show more
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