“…To gain insight into the fundamental proderstood. For ablation in the vicinity of the ArF laser's 193 nm radiation, it has been proposed that the predominant process for organic materials is ablative PhotodecomPosition (APD) [5,61, which is also considered fundamental in the ab-Accepted for publication October 11, 1994. cesses of UV laser ablation, several investigations have focused on the resulting ablation plume, including high-speed photographic techniques [lo] and mass spectrometric analysis [8,111. The present report covers a quantitative technique for the analysis of ablation plumes using in situ timeresolved laser light scattering.…”