Massively Parallel Nanorobotics for Lithography and Data Storage

Abstract

Nanometer-scale structures and devices can be constructed by using the tip of a scanning probe microscope (SPM) as a robot. The tip manipulates nanocomponents to build assemblies, or induces material deposition to form patterns on a substrate. Fabrication by SPM methods has severe throughput problems, which can be solved by using arrays of tips built by MEMS (MicroElectroMechanical Systems) technology, in conjunction with the strategies and algorithms presented in this paper. Massively parallel methods are described here for writing and reading nanometer-scale patterns of lines or dots, or for manipulating nanoparticles with arrays of SPM tips. The tip array moves as a whole in the x, y plane of the substrate, and does not require individual x, y drives and controllers for the individual tips. Applications to nanolithography are discussed, as well as a microelectromechanical storage device, analogous to a compact disc (CD) on a chip, and called an editable nanoCD. NanoCDs can be read and edited by the tip-array methods presented here, and have bit densities and reading speeds that are several orders of magnitude higher than those of current CDs.

Robotic nanoassembly: current developments and challenges

“…The NanoMan's nanomanipulation applications include nanotube manipulation for electrical and mechanical studies, relocation of nano particles for electronic, magnetic, or optical devices, dissection or alignment of molecules for life science and polymer research. Speed could be increased in some applications using multiple tips or systems (Requicha, 1999). It also has nanolithography applications including patterning with anodic oxidation for quantum devices and nanoscale transistors and surface scratching for nanomarkers (NanoMan, 2008).…”

Nanorobots, NEMS, and Nanoassembly

“…The first is the need for high speed in reading and writing. Speed can be increased dramatically by using multitip arrays [47]. The second is more pernicious: for swift reading and writing, the particles must be positioned originally at the vertices of a grid.…”

Ultrasonic assisted nanomanipulations with atomic force microscope

“…In particular, colloid NP can be obtained having an exact predefined size by using the relatively inexpensive technologies; in addition, planar structures with NP also demonstrate great technological potential. For example, it has been shown [5][6] that, at a certain placement of gold NP into the points of nanometer mesh, it is possible to achieve the density of information recording on its surface of the order of several Tb/in 2 . Furthermore, SPM has been instrumental in creating numerous up-to-date prototypes of electronic and optoelectronic devices.…”