We report the structure and magnetic properties of
Zn1−xMnxO
thin films grown on Si(001) substrates by pulsed laser deposition. Structure and phase
evolution with Mn doping has been studied using x-ray diffraction, electron diffraction, and
high-resolution electron microscopy. The undoped and 1% Mn-doped ZnO films are
completely (001) oriented, and further Mn doping deteriorates the (001) orientation. For
Mn concentrations below 3%, only the hexagonal ZnO phase exists in the films
without secondary phases. As the Mn concentration reaches 5%, secondary phase
Mn2O3
was found aggregating at grain boundaries. All the Mn-doped films show ferromagnetic
properties at room temperature, and the magnetic moment decreases as the Mn
concentration increases. Our results suggest that the ferromagnetism observed in
Zn1−xMnxO
thin films is intrinsic rather than associated with secondary phases.