Material optimization of phosphorus-doped polycrystalline silicon germanium for miniaturized thermoelectric generator

Wang, Z.; Su, Juanjuan; Andel, Y. van; Nguyen, Hai P.; Vullers, Ruud

doi:10.1109/transducers.2011.5969468

Cited by 4 publications

(5 citation statements)

References 8 publications

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“…Figure 7 illustrates that the thickness reduction of Si-based nanostructured materials leads to a decrease in thermal conductivity, resulting in a decrease of up to two orders of magnitude from the κ of crystalline Si (∼100 W/m•K) [4,7,30]. Thermal conductivity dependence on material's thickness for Si [20,[117][118][119][120][121][122][123][124] and SiGe [24,[125][126][127][128][129][130] thin films.…”

Section: Thermal Conductivity Reductionmentioning

confidence: 99%

“…Z. Wang et al [127] reported the optimization of a polycrystalline silicon germanium (poly-SiGe) material by phosphorus doping for its use in thermal energy harvesting. The poly-SiGe film doping was carried out by the implantation method with phosphorus ions.…”

Section: State-of-the-art Of Si-based Thin Films Materialsmentioning

confidence: 99%

“…Figure 7. Thermal conductivity dependence on material's thickness for Si[20,[117][118][119][120][121][122][123][124] and SiGe[24,[125][126][127][128][129][130] thin films.…”

mentioning

confidence: 99%

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Review of Si-Based Thin Films and Materials for Thermoelectric Energy Harvesting and Their Integration into Electronic Devices for Energy Management Systems

Ascencio-Hurtado

Ambrosio

Estrada-López

et al. 2023

Eng

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Energy harvesters are autonomous systems capable of capturing, processing, storing, and utilizing small amounts of free energy from the surrounding environment. Such energy harvesters typically involve three fundamental stages: a micro-generator or energy transducer, a voltage booster or power converter, and an energy storage component. In the case of harvesting mechanical vibrations from the environment, piezoelectric materials have been used as a transducer. For instance, PZT (lead zirconate titanate) is a widely used piezoelectric ceramic due to its high electromechanical coupling factor. However, the integration of PZT into silicon poses certain limitations, not only in the harvesting stage but also in embedding a power management electronics circuit. On the other hand, in thermoelectric (TE) energy harvesting, a recent approach involves using abundant, eco-friendly, and low-cost materials that are compatible with CMOS technology, such as silicon-based compound nanostructures for TE thin film devices. Thus, this review aims to present the current advancements in the fabrication and integration of Si-based thin-film devices for TE energy harvesting applications. Moreover, this paper also highlights some recent developments in electronic architectures that aim to enhance the overall efficiency of the complete energy harvesting system.

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Section: Thermal Conductivity Reductionmentioning

confidence: 99%

Section: State-of-the-art Of Si-based Thin Films Materialsmentioning

confidence: 99%

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Review of Si-Based Thin Films and Materials for Thermoelectric Energy Harvesting and Their Integration into Electronic Devices for Energy Management Systems

Ascencio-Hurtado

Ambrosio

Estrada-López

et al. 2023

Eng

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“…The existence of the contact metal layer, such as Al, Cu, Pt, Ti or Au with low resistance value is necessary to enable high device operating performance with low power consumption and low energy losses. Furthermore, electrical conductors with high contact characteristics is important in metal layer formation of various MEMS and NEMS devices, such as MEMS microheater (Hamid et al 2015), RF MEMs devices (Hsieh et al 2001;Lee et al 2006;Rebeiz 2003), MEMS sensors Ruiz et al 2014;Wang et al 2011), and also various silicon based CMOS compatible RF-ICs (Capelle et al 2012;Chang et al 2012).…”

Section: Introductionmentioning

confidence: 99%

Enhancement of metal coil quality on selective p-silicon based planar electromagnetic coil by thermal annealing process

et al. 2015

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“…1,2) In addition, the relatively low thermal conductivity of SiGe originating from its disordered alloy lattice makes the SiGe thin film applied as a thermoelectric component in IC-compatible thermoelectric microsystems. 3) It was recently found that the SiGe/Si heating electrode has a beneficial effect on decrease of the current required to induce phase transition of chalcogenide materials, namely, transition current. 4) Since the power consumption of the GeSbTe phase change memory 5) depends strongly on the transition current for the GeSbTe film, the reduction of the transition current has been a subject of considerable interest.…”

Section: Introductionmentioning

confidence: 99%

Heating Effect of Polycrystalline SiGe/Si Thin Films on Phase Transition of GeSbTe Films

Lee

2013

Mater. Trans.

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This work reports the detailed manufacturing process of polycrystalline SiGe/Si thin film layers and their heating effect on phase transition of GeSbTe chalcogenide films. The SiGe and Si films were grown successively by chemical vapor deposition, and different methods were applied to dope the SiGe films depending on their semiconducting nature because of phosphorus autodoping. Although the minimum dopant concentration for the n-type SiGe films was much higher than that for the p-type SiGe films, the lowest transition currents were measured almost same with both p-and n-type SiGe films. The transition current decreased further with reducing contact area between the GeSbTe and SiGe films. These results indicate that the contact area scaling and the formation of SiGe/Si films with a dopant concentration smaller than a critical value are both required to induce the phase transition of GeSbTe at a submilliampere level of transition current.

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Material optimization of phosphorus-doped polycrystalline silicon germanium for miniaturized thermoelectric generator

Cited by 4 publications

References 8 publications

Review of Si-Based Thin Films and Materials for Thermoelectric Energy Harvesting and Their Integration into Electronic Devices for Energy Management Systems

Review of Si-Based Thin Films and Materials for Thermoelectric Energy Harvesting and Their Integration into Electronic Devices for Energy Management Systems

Enhancement of metal coil quality on selective p-silicon based planar electromagnetic coil by thermal annealing process

Heating Effect of Polycrystalline SiGe/Si Thin Films on Phase Transition of GeSbTe Films

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