Material Parameters of the Temperature-Stable Si0&lt;inf&gt;2&lt;/inf&gt;/ YZ LiTaO&lt;inf&gt;3&lt;/inf&gt;Structure

Parker, T.E.; Wichansky, H.

doi:10.1109/ultsym.1975.196571

Cited by 2 publications

(4 citation statements)

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“…1 ¼ 6:49%, and K 2 2 ¼ 2:92%. Comparing the simulation data with the measurement results, the measured coupling coefficient approximates K 2 2 , which implies that the measured device was fabricated on the upper surface of AlN/À52 Y-X LiNbO 3 .…”

Section: Resultsmentioning

confidence: 61%

“…In the same region, K 2 2 decreases monotonically. Although a maximum value of approximately 6.76% is obtained for K 2 1 , this occurred in the leaky wave region with a very high attenuation coefficient of 2:51 Â 10 À3 .…”

Section: Resultsmentioning

confidence: 87%

“…In Fig. 4(a), K 2 1 is greater than K 2 2 in the entire h= range of interest. In the Rayleigh wave region, if, for example, h= is less than 0.013, K 2 1 increases from 5.36% to a peak value of 5.58% at h= ¼ 0:007, but then starts to decrease.…”

Section: Resultsmentioning

confidence: 88%

“…Hickernell has addressed the role of thin-films played in SAW technology [1]. The zero temperature coefficient of frequency (TCF) structure using SiO 2 /Y-Z LiTaO 3 has been reported by Parker and Wichansky [2]. The use of SiO 2 thin film sputtered on LiNbO 3 to achieve a high temperature stable SAW device with super high coupling has been reported by Yamanouchi and Ishii [3].…”

Section: Introductionmentioning

confidence: 99%

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Propagation Characteristics of Surface Acoustic Waves in AlN/128° Y–X LiNbO₃ Structures

Lee

et al. 2009

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In this study, propagation characteristics of surface acoustic waves (SAWs) in a layered piezoelectric structure consisting of an AlN thin film sputtered on 128°Y-X LiNbO 3 are investigated. The phase velocity and coupling coefficient of the layered structure with interdigital transducers (IDTs) and/or metal thin films deposited at various interfaces will be calculated numerically. The effects of the polarity of 128°Y-X LiNbO 3 on SAW characteristics are illustrated. By substituting the constituting relations into the Christoffel equations along with enforcing the appropriate boundary conditions on the interfaces, SAW characteristics of layered piezoelectric structures are determined by employing a matrix approach. Phase velocity and coupling coefficient of SAWs are presented versus h/λ, where h is the thickness of the AlN film and λ is the wavelength. Simulation results are compared with experimental data, which are calculated from S-parameter measurements of transversal SAW filters. A well matched comparison is demonstrated. Results obtained can be applied for the design of SAW devices using AlN/128°Y-X LiNbO 3 structures.

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Section: Resultsmentioning

confidence: 61%

Section: Resultsmentioning

confidence: 87%

Section: Resultsmentioning

confidence: 88%

Section: Introductionmentioning

confidence: 99%

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Propagation Characteristics of Surface Acoustic Waves in AlN/128° Y–X LiNbO₃ Structures

Lee

et al. 2009

jjap

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P2N-2 High Frequency Resonators with Excellent Temperature Characteristic Using Edge Reflection

Kadota

Kimura

Tamasaki

2006

2006 IEEE Ultrasonics Symposium

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Most surface acoustic wave (SAW) radio frequency (RF) filters and duplexers have the Alelectrodes/36-48 • YX-LiTaO 3 substrate structure, which has an optimum coupling factor and an optimum reflection coefficient but does not have a good temperature coefficient of frequency (TCF). The TCF can be improved by depositing SiO 2 film with positive TCF on a transversal SAW filter consisting of a substrate with negative TCF such as LiTaO 3 and LiNbO 3 . However, resonator-type SAW devices combining SiO 2 film, Al electrodes, and LiTaO 3 substrate do not show a good frequency characteristics regardless of Al thickness. Because both (a) a SiO 2 /thin Al-electrodes/LiTaO 3 structure with small convex portions on the SiO 2 surface and (b) a flattened SiO 2 /Al-electrodes/LiTaO 3 structure have a small reflection coefficient, and (c) a SiO 2 /thick Alelectrodes/LiTaO 3 structure with large convex portions has a small coupling factor. It is considered as a countermeasure that a resonator using the reflection of a shear horizontal (SH) wave at substrate edges of their structures shows a good frequency characteristic because its reflection coefficient is very large regardless of Al thickness. It has been difficult to obtain a high-frequency edge reflection resonator because it requires too fine substrate edges for ordinary machining techniques. However, a high-frequency edge reflection resonator with a good TCF and an excellent frequency characteristic has been realized using our newly developed method of obtaining fine edges.

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Material Parameters of the Temperature-Stable Si0<inf>2</inf>/ YZ LiTaO<inf>3</inf>Structure

Cited by 2 publications

References 6 publications

Propagation Characteristics of Surface Acoustic Waves in AlN/128° Y–X LiNbO₃ Structures

Propagation Characteristics of Surface Acoustic Waves in AlN/128° Y–X LiNbO₃ Structures

P2N-2 High Frequency Resonators with Excellent Temperature Characteristic Using Edge Reflection

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Material Parameters of the Temperature-Stable Si0<inf>2</inf>/ YZ LiTaO<inf>3</inf>Structure

Cited by 2 publications

References 6 publications

Propagation Characteristics of Surface Acoustic Waves in AlN/128° Y–X LiNbO3 Structures

Propagation Characteristics of Surface Acoustic Waves in AlN/128° Y–X LiNbO3 Structures

P2N-2 High Frequency Resonators with Excellent Temperature Characteristic Using Edge Reflection

Contact Info

Product

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About

Propagation Characteristics of Surface Acoustic Waves in AlN/128° Y–X LiNbO₃ Structures

Propagation Characteristics of Surface Acoustic Waves in AlN/128° Y–X LiNbO₃ Structures