Optical Design and Fabrication 2017 (Freeform, IODC, OFT) 2017
DOI: 10.1364/oft.2017.otu3b.4
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Material Removal and Thermal Impact of Femtosecond-Laser Polishing for Germanium-Based Freeform Optics

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Cited by 2 publications
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“…The unique advantages of femtosecond laser, including high peak power and high accuracy of ablation on metal targets, have been utilized widely. Recently, Taylor et al 9 investigated experimentally the effectiveness of femtosecond lasers as alternative laser sources for noncrystalline silicon and germanium polishing. They found that both the laser pulse energy and the overlapping rate of the laser beam influence the surface roughness in femtosecond laser polishing; in addition, the mechanisms for femtosecond laser polishing of nonmetals have been investigated.…”
Section: Introductionmentioning
confidence: 99%
“…The unique advantages of femtosecond laser, including high peak power and high accuracy of ablation on metal targets, have been utilized widely. Recently, Taylor et al 9 investigated experimentally the effectiveness of femtosecond lasers as alternative laser sources for noncrystalline silicon and germanium polishing. They found that both the laser pulse energy and the overlapping rate of the laser beam influence the surface roughness in femtosecond laser polishing; in addition, the mechanisms for femtosecond laser polishing of nonmetals have been investigated.…”
Section: Introductionmentioning
confidence: 99%