Material removal process of single-crystal SiC in chemical-magnetorheological compound finishing

Liang, Huazhuo; Lu, Jiabin; Pan, Jisheng; Yan, Qiusheng

doi:10.1007/s00170-017-1098-z

Cited by 40 publications

(11 citation statements)

References 16 publications

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“…It is more suitable as a catalyst for the Fenton reaction. The results of Liang et al (2018a) showed that for the MRCF of SiC, the contribution of the mechanical effect to the MRR is 68.22% to 91.42%, while that of the chemical effect to the MRR is only 3.74% to 26.22%, which is considerably less. The strength of the chemical action of the polishing solution on the substrate needs to be enhanced.…”

Section: Introductionmentioning

confidence: 92%

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Preparation and polishing properties of water-based magnetorheological chemical finishing fluid with high catalytic activity for single-crystal SiC

Deng

Yan

et al. 2020

Journal of Intelligent Material Systems and Structures

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A water-based high catalytic activity magnetorheological chemical finishing fluid (HCAMRCFF) was prepared and modified to enhance the chemical action strength in magnetorheological chemical finishing (MRCF) for single-crystal SiC. The fluid consisted of ferroferric oxide (Fe3O4) and chromium (Cr), deionized water (DW), polyethylene glycol (PEG) and oleic acid, and hydrogen peroxide (H2O2) as the composite catalyst particles, base carrier liquid, surfactants, and oxidant, respectively. HCAMRCFFs with different component concentrations were used to modify via evaluating their catalytic activity. Moreover, the MRCF experiments on SiC were conducted using the prepared HCAMRCFFs. The results show that the catalytic activity increases with an increase in the oxidant concentration. Furthermore, composite catalysts and composite surfactants can significantly improve their catalytic activity. The catalytic activity also increases with an increase in the concentration of composite catalysts. In the composite catalysts, increasing the Cr concentration can significantly enhance the catalytic performance. Composite surfactants can exert the relative superiority to enhance the catalytic activity. Compared with the unmodified finishing fluid, the catalytic activity of modified HCAMRCFF increases by 65.4%; the material removal rate (MRR) of SiC increases by 72.5% up to 635.621 nmh−1, and a surface with a roughness of 0.33 nm is obtained.

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Section: Introductionmentioning

confidence: 92%

“…Subsequently, the generated SiO 2 oxide layer is stripped and removed via mechanical action and with the polishing solution. Finally, the ultra-precision processed surface of the substrate is obtained (Liang et al, 2018a).…”

Section: Mrcf Principle and Devicementioning

confidence: 99%

Preparation and polishing properties of water-based magnetorheological chemical finishing fluid with high catalytic activity for single-crystal SiC

Deng

Yan

et al. 2020

Journal of Intelligent Material Systems and Structures

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“…The combination of traditional MAF or MRF processes with other phenomena (e.g., electrochemical and ultrasonic ones) is another possible solution to improve MRR and potentially enhance finishing performance toward meeting industrial needs. The literature reports several hybrid applications with promising results [ 65 – 69 ]. Hybridization can help achieve the desired efficiency, but individual and interactive knowledge of the processes is one of the key elements.…”

Section: Trends For Future Research On Magnetic Field-assisted Finishingmentioning

confidence: 99%

Magnetic field-assisted finishing processes: from bibliometric analysis to future trends

Souza

Silva

Ratay

et al. 2022

J Braz. Soc. Mech. Sci. Eng.

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The need for ultraprecision finishing has grown, and magnetic field-assisted finishing has shown potential for overcoming some challenges. This study evaluates the scientific production and identifies future directions of magnetic field-assisted finishing based on a bibliometric analysis. Using Bibliometrix, network mapping and descriptive analysis were performed on 1558 documents related to magnetic field-assisted finishing-related research published over the past 51 years. The results of the comprehensive literature reviewed showed that the theme exhibits a rising trend of 56% in the last 10 years, being mainly conducted by Chinese, Indian, and American researchers. Different geometries and materials can be finished and which had surface roughness ranges from sub-nanometer- to micrometer-scale. Surface finishing of freeform dies and molds, optical components, and medical devices have been standing out as current process applications in tooling, aerospace, and biomedical industries. AISI 304 stainless steel was the most tested metal. Finally, potential areas of research were identified in the coming years, which could lead to new fields of application for magnetic field-assisted finishing in industry.

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“…The physical properties of the Si 3 N 4 ceramic balls obtained are listed in Table 1. Since the lack of information on the slurry component and quantities of CMRF in Si 3 N 4 ball polishing, The components and quantities of the slurry were selected based on the previous experimental results of our research group, which applied CMRF in polishing ceramic planes (SrTiO 3 and SiC) [16,17]. The magnetorheological slurry was made up with 400 mL polishing fluid and the mixed powders of 4% diamond abrasive grains (1 µm) and 16% hydroxyl iron powders (3 µm).…”

Section: Polishing Experimentsmentioning

confidence: 99%

“…The material removal rate was 0.154 µm/min and the final surface roughness was around 8 nm, which demonstrated a good processing efficiency and high quality on the surface finish. Liang et al [17] also applied CMRF for the polishing of SiC ceramic plane surfaces. Results showed that the final surface roughness was about 0.6 nm when the magnetorheological slurry consisting of carbonyl iron powders and H 2 O 2 was applied.…”

Section: Introductionmentioning

confidence: 99%

Polishing of Silicon Nitride Ceramic Balls by Clustered Magnetorheological Finish

Xiao

Mei

et al. 2020

Micromachines

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In this study, a novel finishing method, entitled clustered magnetorheological finish (CMRF), was proposed to improve surface finish of the silicon nitride ( Si 3 N 4 ) balls with ultra fine precision. The effects of different polishing parameters including rotation speeds, eccentricities and the machining gaps on surface finish of Si 3 N 4 balls were investigated by analyzing the roughness, sphericity and the micro morphology of the machined surface. The experimental results showed that the polishing parameters significantly influenced the surface finish. The best surface finish was obtained by using the polishing parameters: the machining gap of 0.8 mm, the eccentricity of 10 mm and the rotation ratio of 3/4. To further investigate the influence of the polishing parameters on the surface finish, an analytical model was also developed to analyze the kinematics of the ceramic ball during CMRF process. The resulting surface finish, as a function of different polishing parameters employed, was evaluated by analyzing the visualized finishing trace and the distribution of the contact points. The simulative results showed that the distribution and trace of the contact points changed with different polishing parameters, which was in accordance with the results of experiments.

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Material removal process of single-crystal SiC in chemical-magnetorheological compound finishing

Cited by 40 publications

References 16 publications

Preparation and polishing properties of water-based magnetorheological chemical finishing fluid with high catalytic activity for single-crystal SiC

Preparation and polishing properties of water-based magnetorheological chemical finishing fluid with high catalytic activity for single-crystal SiC

Magnetic field-assisted finishing processes: from bibliometric analysis to future trends

Polishing of Silicon Nitride Ceramic Balls by Clustered Magnetorheological Finish

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