Material Selection, Micromachining, and Measurements of THz Waveguide Components

Micromachining and Its Applications for Electronics

“…This machine was extensively used to make waveguides at W band of frequency where the waveguide size is 2.54 × 1.27 mm within linear tolerances of 10 μm, surface roughness of the order of 150nmRa and flatness of 0.3 μm. when this frequent raises to 1THz the waveguide size becomes 0.245 × 0.127 mm within linear tolerances of 1-2 μm, surface roughness of 40-50 nmRa and flatness also of the order of half the wavelength at such a higher frequency Bhardwaj et al [1,[42][43][44][45][46].…”

“…Tool change is a critical operation in micro-milling because the tool runout, tool height, and collet runout are modified. Therefore, tool change must be performed carefully, cleaning all the shank, collets, tools, and nuts and applying controlled torques [46].…”