We present a method
of manufacturing semitransparent mesh-shaped
electrodes using laser structuring of a polymer followed by resistive
thermal evaporation of a metallic layer. Toluene, used for preparing
a polymer solution and its layer deposition, has been replaced with
ethanol, thus eliminating a hazardous solvent from the process. The
influence of adding photosensitizers to the polymer base on the structuring
laser ablation threshold has been investigated, with most prominent
reduction from 1.3 to ∼0.3 W for a UV laser line irradiation.
Finally, and most importantly, the key step of this method, the development
step that includes the removal of a resist, was carried out in water,
thus ruling out completely other environmentally hazardous solvents
from the process. Additionally, it does not require cleanroom conditions.
The final electrode prototype was tested in electro- and thermomodulation
measurements, proving its usefulness in spatial control of electric
field and heat generation. Consequently, our work paves the way for
other applications requiring patterned semitransparent electrodes
made in a sustainable process.