Materials of LIGA technology

Abstract

The progress in microfabrication technologies is currently characterized by an increasing number of microproducts and corresponding efforts for cost effective mass fabrication. In this context, the development and utilization of new application specific materials has become one of the key challenges for the commercial production of miniaturized functional units. This applies, in particular, to the LIGA technique, a sequence of process steps combining deep lithography, microelectroforming and micromoulding, which offers an extremely broad spectrum of materials for the generation of ultraprecise three-dimensional microstructures. A wide variety of polymers, metals, metal alloys and ceramic materials are by now accessible for fabricating microdevices. There are practically no major limitations in selecting the desired material properties, e.g. in respect of mechanical stiffness or biocompatibility, optical transparency or magnetic properties, resistance against corrosion or whatever is required by the specific function of a microdevice.

Polymer microfabrication methods for microfluidic analytical applications

“…[17]. Tables 1 and 2 summarize the physical and chemical properties of the most commonly used thermoplastic polymers for micromolding.…”

Fabrication of Advanced Functional Devices Combining Soft Chemistry with X‐ray Lithography in One Step

“…[14] Three-dimensional structures have been generated in a thick layer (up to 600 mm) using DXRL, and the process allows fast production of ultra-precise microstructures with extreme aspect ratio. [15] Moreover, polymeric three-dimensional structures with sub-micrometer resolution have been patterned showing rods with a radius of 200 nm but an even better lateral resolution is possible. [16] Only a few studies have been published combining DXRL with metallorganic precursors.…”

Powder‐Based Ceramic Meso‐ and Microscale Fabrication Processes

“…There are instances in which LIGA-produced molds were filled with ceramic materials. [66] To reproduce the shapes in a casting process accurately, shrinkage and cracking problems have to be solved. Chan et al used a tetraethoxysilane (TEOS) sol filled with 50 nm titania particles for casting into PMMA molds.…”