Materials of Nanocrystalline Sr_1-xBa_xBi₄Ti₄O₁₅ for Piezoelectric Sensor

Abstract

Abstract. The nanocrystalline Strontium Barium Bismuth Titanate (SBBT) thin films with structure of Al/TiO 2 /SBBT/TiO 2 /RuO 2 /SiO 2 /Si were fabricated using sol-gel technique. The source materials are bismuth acetate Bi(CH 3 COO) 2 , barium acetate Bi(CH 3 COO) 2 , strontium acetate Sr(CH 3 COO) 2 and titanium butoxide (Ti(OC 4 H 9 ) 4 ). Different nanostructures of the films were prepared with un-annealed condition as well as after annealing at three different temperatures of 400, 500 and 600 0 C, in air for 2 minutes. The structure of SBBT thin films have been systematically studied by XRD, AFM, SEM and dielectric constant measurement. For the sensor device measurement, the SBBT thin film pressure sensors were tested by pneumatic loading method at pressure range between 0 to 450 kPa. It was found that the sensing properties of the films were affected by the crystalline nature of the films. It is shown that there is a linear relationship between the crystallization, grains size and dielectric properties with the sensing response of the film towards pressure.

Effect of La₂O₃ Additions on Microstructure, Morphology and Pressure Sensing Behaviour of PZT Based Ceramics Sintered in Al₂O₃ Environment

“…Small amount of silver paste was applied to both flat surfaces to act as electrodes. Piezoelectric properties of the ceramics were measured using customized piezoelectric pressure sensor [11]. An electrometer was used to record the piezoelectric voltage of the sensor due to strain or deformation in the PLZT crystals.…”