Matrices pattern using FIB; ‘Out‐of‐the‐box’ way of thinking

Fleger, Yafit; Gotlib-Vainshtein, Katya; Talyosef, Yosef

doi:10.1111/jmi.12500

Cited by 1 publication

(1 citation statement)

References 18 publications

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“…While other microscopy parameters, such as the stage position, can be controlled via an application programming interface (API) or patterning options of the manufacturer, large-area patterning can be automated by FIB-o-mat. Another interesting approach for the automation of small and regularly arranged patterns makes use of the pitch in high-level patterns [ 31 ]. When setting the pitch of a 10 μm rectangle to 10 nm, an array of 1000 × 1000 holes with 10 nm spacing may be created.…”

Section: The Fib-o-mat Toolboxmentioning

confidence: 99%

The patterning toolbox FIB-o-mat: Exploiting the full potential of focused helium ions for nanofabrication

Deinhart¹,

Kern²,

Kirchhof³

et al. 2021

Beilstein J. Nanotechnol.

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Focused beams of helium ions are a powerful tool for high-fidelity machining with spatial precision below 5 nm. Achieving such a high patterning precision over large areas and for different materials in a reproducible manner, however, is not trivial. Here, we introduce the Python toolbox FIB-o-mat for automated pattern creation and optimization, providing full flexibility to accomplish demanding patterning tasks. FIB-o-mat offers high-level pattern creation, enabling high-fidelity large-area patterning and systematic variations in geometry and raster settings. It also offers low-level beam path creation, providing full control over the beam movement and including sophisticated optimization tools. Three applications showcasing the potential of He ion beam nanofabrication for two-dimensional material systems and devices using FIB-o-mat are presented.

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Section: The Fib-o-mat Toolboxmentioning

confidence: 99%