Matrix laser vibrometer for transient modal imaging and rapid nondestructive testing

Kilpatrick, James; Markov, Vladimir B.

doi:10.1117/12.802929

Cited by 17 publications

(11 citation statements)

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“…However, the alignment of the optics is very time consuming, difficult, and hence expensive. Publications of higher channel numbers are based on imaging techniques [11], and the solutions are restricted to a fixed specified measurement grid [12]. Moreover, optical crosstalk between the channels [13] and limitations in the detectable vibration bandwidth are serious problems in most published solutions.…”

Section: Introduction: Photonic Integration For Laser-doppler Vibrometrymentioning

confidence: 99%

Integrated nanophotonic frequency shifter on the silicon-organic hybrid (SOH) platform for laser vibrometry

Lauermann¹,

Weimann²,

Palmer³

et al. 2014

AIP Conference Proceedings

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Section: Introduction: Photonic Integration For Laser-doppler Vibrometrymentioning

confidence: 99%

Integrated nanophotonic frequency shifter on the silicon-organic hybrid (SOH) platform for laser vibrometry

Lauermann¹,

Weimann²,

Palmer³

et al. 2014

AIP Conference Proceedings

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“…Among different interferometric measurement methods for dynamic characterization Laser Doppler Vibrometry (LDV) [7] is considered to be the most accurate one. It allows for determination of resonance frequencies as well as determination of vibration amplitude distribution over an object under test.…”

Section: Introductionmentioning

confidence: 99%

Smart pixel camera based signal processing in an interferometric test station for massive parallel inspection of MEMS and MOEMS

Styk

Lambelet²,

Røyset

et al. 2010

SPIE Proceedings

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The paper presents the electro-optical design of an interferometric inspection system for massive parallel inspection of Micro(Opto)ElectroMechanicalSystems (M(O)EMS). The basic idea is to adapt a micro-optical probing wafer to the M(O)EMS wafer under test. The probing wafer is exchangeable and contains a micro-optical interferometer array: a low coherent interferometer (LCI) array based on a Mirau configuration and a laser interferometer (LI) array based on a Twyman-Green configuration. The interference signals are generated in the micro-optical interferometers and are applied for M(O)EMS shape and deformation measurements by means of LCI and for M(O)EMS vibration analysis (the resonance frequency and spatial mode distribution) by means of LI. Distributed array of 5x5 smart pixel imagers detects the interferometric signals. The signal processing is based on the "on pixel" processing capacity of the smart pixel camera array, which can be utilised for phase shifting, signal demodulation or envelope maximum determination. Each micro-interferometer image is detected by the 140 x 146 pixels sub-array distributed in the imaging plane. In the paper the architecture of cameras with smart-pixel approach are described and their application for massive parallel electrooptical detection and data reduction is discussed. The full data processing paths for laser interferometer and low coherent interferometer are presented.

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“…There have been many attempts to extend measurement capabilities to 2D case. The most successful ones include additional scanning system [6], special beam steering with spatial light modulators [7] and multiple sensors head [8]. Application of two dimensional detector array (matrix detector, such as CCD or CMOS camera) would speed up 2D measurement process considerably.…”

Section: Introductionmentioning

confidence: 99%

Heterodyne interferometry with Smart Pixel detector for vibration investigations

Styk¹,

Kozłowski²

2014

AIP Conference Proceedings

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Matrix laser vibrometer for transient modal imaging and rapid nondestructive testing

Cited by 17 publications

References 0 publications

Integrated nanophotonic frequency shifter on the silicon-organic hybrid (SOH) platform for laser vibrometry

Integrated nanophotonic frequency shifter on the silicon-organic hybrid (SOH) platform for laser vibrometry

Smart pixel camera based signal processing in an interferometric test station for massive parallel inspection of MEMS and MOEMS

Heterodyne interferometry with Smart Pixel detector for vibration investigations

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