The diamond-like compound Cu 3 PSe 4 with low lattice thermal conductivity is deemed to be a promising thermoelectric material, which can directly convert waste heat into electricity or vice versa with no moving parts and greenhouse emissions. However, its performance is limited by its low electrical conductivity. In this study, we report an effective method to enhance thermoelectric performance of Cu 3 PSe 4 by defect engineering. It is found that the carrier concentrations of Cu 3-x PSe 4 (x = 0, 0.03, 0.06, 0.09, 0.12) compounds are increased by two orders of magnitude as x [ 0.03, from 1 9 10 17 to 1 9 10 19 cm-3. Combined with the intrinsically low lattice thermal conductivities and enhanced electrical transport performance, a maximum zT value of 0.62 is obtained at 727 K for x = 0.12 sample, revealing that Cu defect regulation can be an effective method for enhancing thermoelectric performance of Cu 3 PSe 4 .