2004
DOI: 10.1063/1.1836854
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Measurement accuracy analysis of photocarrier radiometric determination of electronic transport parameters of silicon wafers

Abstract: Simulations are performed to investigate the accuracy of the simultaneous determination of the electronic transport properties (the carrier lifetime, the carrier diffusion coefficient, and the front and rear surface recombination velocities) of silicon wafers by means of the photocarrier radiometry (PCR) technique through fitting frequency-scan data to a rigorous model via a multi-parameter fitting process. The uncertainties of the fitted parameter values are analyzed by calculating the dependence of the squar… Show more

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Cited by 49 publications
(14 citation statements)
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“…20 The fitted lifetime and front surface recombination velocity were 70 s and 412 cm/ s, respectively, in agreement with typical values for nonimplanted silicon wafers. N is the total number of data points.…”
Section: ͑13͒supporting
confidence: 84%
“…20 The fitted lifetime and front surface recombination velocity were 70 s and 412 cm/ s, respectively, in agreement with typical values for nonimplanted silicon wafers. N is the total number of data points.…”
Section: ͑13͒supporting
confidence: 84%
“…Similarly, the nm-thick i-a-Si:H layer was very thin compared to the CDW wavelength 1 |σ 2 | even at the highest modulation frequency f = 100 kHz (∼µm), which justified reducing the CDW solution at the interface to boundary conditions Eqs. (5) and (6). The best-fitted results show that the values from the meanvalue best-fit computational program are all close to those obtained with the independent statistical best fit program.…”
Section: A Doping Density Dependent Measurementssupporting
confidence: 70%
“…LIC images can only be obtained up to 2 kHz due to the small camera signal at short exposure times at high frequencies. This upper frequency limit is not enough for separating the resolved transport parameters by multi‐parameter fitting . Therefore, for homodyne LIC, semiconductor samples can be characterized only by their effective lifetime .…”
Section: Resultsmentioning
confidence: 99%