Measurement and Characterization of Surface Quality in Fast Tool Servo Machining of Optical Microstructures

Cheung, Chi Fai; Kwok, Tsz Chun; To, Sandy; Lee, Wing Bun; Jiang, Xiang; Li, H.F.

doi:10.4028/www.scientific.net/kem.381-382.517

Cited by 1 publication

(1 citation statement)

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“…Partially as a complimentary approach to lithographic processes used for 3D microfabrication, ultraprecision diamond machining using well defined micro cutting edges were popular in creating microstructure on flat substrates [7][8][9][10]. More recently efforts to apply slow tool servo ultraprecision diamond machining technique to creating 3D microstructures have also been reported [11][12][13].…”

Section: Introductionmentioning

confidence: 99%

Freeform manufacturing of a microoptical lens array on a steep curved substrate by use of a voice coil fast tool servo

Scheiding¹,

Yi²,

Gebhardt³

et al. 2011

Opt. Express

114

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We report what is to our knowledge the first approach to diamond turn microoptical lens array on a steep curved substrate by use of a voice coil fast tool servo. In recent years ultraprecision machining has been employed to manufacture accurate optical components with 3D structure for beam shaping, imaging and nonimaging applications. As a result, geometries that are difficult or impossible to manufacture using lithographic techniques might be fabricated using small diamond tools with well defined cutting edges. These 3D structures show no rotational symmetry, but rather high frequency asymmetric features thus can be treated as freeform geometries. To transfer the 3D surface data with the high frequency freeform features into a numerical control code for machining, the commonly piecewise differentiable surfaces are represented as a cloud of individual points. Based on this numeric data, the tool radius correction is calculated to account for the cutting-edge geometry. Discontinuities of the cutting tool locations due to abrupt slope changes on the substrate surface are bridged using cubic spline interpolation.When superimposed with the trajectory of the rotationally symmetric substrate the complete microoptical geometry in 3D space is established. Details of the fabrication process and performance evaluation are described.

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