2016
DOI: 10.1116/1.4959565
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Measurement of atmospheric pressure microplasma jet with Langmuir probes

Abstract: A radio frequency argon microplasma jet at atmospheric-pressure is characterized using Langmuir probes. While optical methods are the typical diagnostic for these small scale plasmas, the simplicity and low cost of Langmuir probes makes them an attractive option. The plasma density and electron temperature are measured using existing high-pressure Langmuir probe theories developed for flames and arcs. The density and temperature vary from 1 × 1016 to 1 × 1019 m−3 and 2.3 to 4.4 eV, respectively, depending on t… Show more

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Cited by 27 publications
(19 citation statements)
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“…In this case, the measured electron temperature may differ from the temperature in the plasma volume. [20] This cooling should be taken into account if Equation 1 is fulfilled:…”
Section: Probe Measurementsmentioning
confidence: 99%
“…In this case, the measured electron temperature may differ from the temperature in the plasma volume. [20] This cooling should be taken into account if Equation 1 is fulfilled:…”
Section: Probe Measurementsmentioning
confidence: 99%
“…This is because the assumption of collisionless sheath, as a prerequisite condition for the probe analysis, does not hold in the atmospheric-pressure plasmas due to a short mean free path of electrons. Hence, theoretical analysis of the probe data under atmospheric-pressure condition becomes too complicated to apply for practical measurement [31,32]. Before that, the size of the atmospheric-pressure plasmas is generally very small, and consequently, it is sometimes difficult to insert the probe-electrode.…”
Section: Introductionmentioning
confidence: 99%
“…The plasma density for this source ranges from 10 10 to 10 14 cm 3 . 15 Therefore, only instrument, Doppler, and van der Waals broadening are considered.…”
Section: B Argon Spectral Line Broadeningmentioning
confidence: 99%
“…Data from prior experiments with the linear-field configuration were used for the expected electron temperature and density. 15 A simplified formula to calculate the Stark broadening component is given in Eq. (4), 5 ∆λ…”
Section: A Comparison Of Argon Broadening Componentsmentioning
confidence: 99%
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