Abstract. Radiative transitions N 2 (C-B,0-0) and OH(A-X,0-0) were used in order to estimate rotational temperatures of N 2 (C,0) and OH(A,0) in the middle pressure Ar / 0.5% O 2 RF discharge. N 2 (C,0) and OH(A,0) rotational temperature dependence on power density was determined and quenching / rotational relaxation frequencies of N 2 (C,0) and OH(A,0) was calculated. It was found that at our conditions rotational temperature of OH(A,0) can be used for estimation of gas temperature while N 2 (C,0) rotational temperature overestimates the gas temperature.