SUMMARYThis paper proposes a novel evaluation method for dielectric characteristics of ceramic substrates made of high-permittivity material, (Ba, Sr)TiO 3 (BST), in the microwave region. The dielectric characteristics are obtained accurately and simply by measuring S-parameter and by full-wave analysis for coplanar waveguide (CPW) composed on the substrate. Only the measurement of S 21 response of the CPW is required for evaluation. The effective permittivity (ε eff ) and attenuation constant (α) are calculated from the S 21 data. Relative permittivity (ε r ) and tanδ of substrate material are estimated by relating the ε eff and α quantitatively with their simulated values calculated by the Extended Spectral Domain Approach (ESDA) taking the thickness effect of the conductor into consideration. Three kinds of BST substrates with different Ba to Sr ratios were measured as test samples. The estimated ε r 's of Ba 0.3 Sr 0.7 TiO 3 , Ba 0.5 Sr 0.5 TiO 3 , and Ba 0.7 Sr 0.3 TiO 3 were 662, 1650, and 4450, respectively. These ε r 's decrease slightly as the frequency increases. The estimated errors for the ε r 's are estimated to be less than 0.3%. This method is useful for the evaluation even of a small variation of dielectric constant in high-permittivity materials.