Measurement of displacement using phase shifted wedge plate lateral shearing interferometry

Disawal, Reena; Prakash, Shashi

doi:10.1016/j.optlastec.2015.08.023

Cited by 9 publications

(1 citation statement)

References 36 publications

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“…The measurement accuracy has been improved by using automated fringe analysis techniques in optical metrology. Phase shifted wedge plate lateral shearing interferometry is used by Disawal and Prakash [10] for the measurement of displacement. Since phase shifting technique requires four interferograms for calculation of phase, it is time consuming and the procedure for grabbing the images is also complex.…”

Section: Introductionmentioning

confidence: 99%

Investigations Towards the Measurement of Displacement using Lateral Shearing Interferometry and Fourier Fringe Analysis Technique

Disawal¹,

Thakur²,

Tiwari³

et al. 2023

J. Phys.: Conf. Ser.

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In the present communication we report the measurement of small displacement of reflecting surface (plane mirror) using wedge plate lateral shearing interferometry. With the help of simple mathematical analysis relation between specimen displacement and difference phase is undertaken. Fourier based fringe analysis technique is used for determination of difference phase. Theoretical and experimental investigations are carried out to check the sensitivity of the technique. The detailed discussion regarding sources of errors and uncertainty analysis is also incorporated and the expanded uncertainty is found to be ±0.00236mm. The technique is simple and can be used in industry environment.

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Section: Introductionmentioning

confidence: 99%