Measurement of EUV Spectra from High Z Elements in the Large Helical Device

Suzuki, C.; Katō, Takako; Sakaue, Hiroyuki; Kato, Daiji; Murakami, Izumi; Sato, Kohnosuke; Tamura, N.; Sudo, S.; Yamamoto, Norimasa; Tanuma, H.; Ohashi, Hayato; D’Arcy, Rebekah; Harte, Colm S.; O'Sullivan, Gerry

doi:10.1063/1.3585803

Cited by 2 publications

(1 citation statement)

References 27 publications

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“…Spectroscopic accuracy remains inaccessible to even the most advanced atomic codes. Given their importance, the spectra of these charge states have been widely investigated [6][7][8][9][10][11][12][13][14]. Recently, however, evidence was found calling for a revision of earlier identifications of transitions in Sn 8+ −Sn 14+ ions [15,16].…”

Section: Introductionmentioning

confidence: 99%

EUV spectroscopy of highly chargedSn13+−Sn15+ions in an electron-beam ion trap

et al. 2020

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Extreme-ultraviolet (EUV) spectra of Sn 13+ −Sn 15+ ions have been measured in an electron-beam ion trap (EBIT). A matrix inversion method is employed to unravel convoluted spectra from a mixture of charge states typically present in an EBIT. The method is benchmarked against the spectral features of resonance transitions in Sn 13+ and Sn 14+ ions. Three new EUV lines in Sn 14+ confirm its previously established level structure. This ion is relevant for EUV nanolithography plasma but no detailed experimental data currently exist. We used the Cowan code for first line identifications and assignments in Sn 15+. The collisional-radiative modeling capabilities of the Flexible Atomic Code were used to include line intensities in the identification process. Using the 20 lines identified, we have established 17 level energies of the 4p 4 4d configuration as well as the fine-structure splitting of the 4p 5 ground-state configuration. Moreover, we provide state-of-the-art ab initio level structure calculations of Sn 15+ using the configuration-interaction many-body perturbation code AMBiT. We find that the here-dominant emission features from the Sn 15+ ion lie in the narrow 2% bandwidth around 13.5 nm that is relevant for plasma light sources for state-of-the-art nanolithography.

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Section: Introductionmentioning

confidence: 99%

EUV spectroscopy of highly chargedSn13+−Sn15+ions in an electron-beam ion trap

et al. 2020

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Interpretation of spectral emission in the 20 nm region from tungsten ions observed in fusion device plasmas

Suzuki¹,

Harte²,

Kilbane³

et al. 2011

J. Phys. B: At. Mol. Opt. Phys.

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The UCD community has made this article openly available. Please share how this access benefits you. Your story matters! (@ucd_oa) Some rights reserved. For more information, please see the item record link above. TitleInterpretation of spectral emission around 20 nm region from tungsten ions observed in fusion device plasmas Abstract. We have measured extreme ultraviolet (EUV) spectra from tungsten ions around 20 nm region in plasmas produced in the Large Helical Device at the National Institute for Fusion Science. The spectra after injecting a tungsten pellet into a hydrogen plasma were monitored by a grazing incidence spectrometer. Quasicontinuum spectral feature arising from unresolved transition array (UTA) was observed around 20 nm region in plasmas with temperatures below 1.0 keV. This structure is reasonably considered to be the same one as those observed in another tokamak device or laser produced plasmas under low temperature conditions. Atomic structure calculations have been performed for tungsten ions with open 5p, 5s and 4f subshells (W 7+ -W 27+ ) to interpret this commonly observed feature around 20 nm. Wavelengths and gA values for these transitions were calculated, and their mean wavelengths and extent were compared with the observations, which suggests that the emission largely arises from n = 5-5 transitions in stages lower than W 27+ .

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Measurement of EUV Spectra from High Z Elements in the Large Helical Device

Cited by 2 publications

References 27 publications

EUV spectroscopy of highly chargedSn13+−Sn15+ions in an electron-beam ion trap

EUV spectroscopy of highly chargedSn13+−Sn15+ions in an electron-beam ion trap

Interpretation of spectral emission in the 20 nm region from tungsten ions observed in fusion device plasmas

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