A sulfur hexafluoride (SF 6 ) washin/washout technique was developed using an ultrasonic flowmeter to measure functional residual capacity (FRC) during mechanical ventilation. The ultrasonic flowmeter measures simultaneously flow and molar mass of the mainstream gas. Ventilation distribution was studied using moment ratios analysis (alveolar-based mean dilution number). Accuracy and precision of the measurement technique were tested in a mechanical lung model, and the method's sensitivity to changes of FRC was assessed in seven ventilated rabbits and six children. In the mechanical lung model with a volume range from 10 to 60 mL, the mean error of FRC measurement was 0.096 Ϯ 0.9 mL (range, 0 -2 mL). In seven rabbits (mean body weight, 3.6 kg), measurements of FRC and alveolar-based mean dilution number were made at positive end-expiratory pressures (PEEP) of 0, 3, and 6 cm H 2 O. The mean coefficient of variation of 66 FRC-measurements was 5.5% (range, 0 -15.3%). As the applied PEEP increased, mean FRC per kilogram body weight increased from 13.3 Ϯ 3.4 mL/kg (PEEP of 0 cm H 2 O) to 16.7 Ϯ 3.6 mL/kg (PEEP of 3 cm H 2 O) and to 20.8 Ϯ 4.3 mL/kg (PEEP of 6 cm H 2 O). Alveolar-based mean dilution number decreased accordingly from 1.94 Ϯ 0.42 (PEEP ϭ 0; mean Ϯ SD), to 1.91 Ϯ 0.45 (PEEP ϭ 3) and to 1.59 Ϯ 0.35 (PEEP ϭ 6). In the six children, as applied PEEP increased, mean FRC per kilogram increased from 21.1 Ϯ 4.51 mL/kg (PEEP ϭ 0), to 22.4 Ϯ 1.8 mL/kg (PEEP ϭ 5) and 27.2 Ϯ 3.4 mL/kg (PEEP ϭ 10). FRC measurement using the ultrasonic flowmeter is accurate and simple to use in ventilated and spontaneously breathing children. The monitoring of FRC is an important tool for interpreting volume-dependent pulmonary mechanics (e.g. lung elastic recoil pressure or airway resistance). Since the open-circuit MBNW was first described by Darling et al. in 1940 (1), several investigators have used gas washout techniques to measure FRC in spontaneously breathing (2, 3) and mechanically ventilated patients (4 -6). Other gas washout techniques involve helium dilution (7), argon washout (8), or washout of SF 6 (9). Each of these techniques has its own limitations. The MBNW can only be accurately performed if the patient's oxygen requirement does not exceed a certain amount (4 -6).Although MBNW can be performed easily, the considerable changes in gas viscosity during the washout maneuver significantly affect the accuracy of the gas flow measurement by pneumotachography (10, 11). The helium dilution technique is based on a closed circuit, and a leak in the measuring system reduces its accuracy (7). SF 6 washout is a potentially suitable technique for children, including those who require near 100% oxygen to maintain normal Hb saturation. There are a few studies using SF 6 as a washout gas (12-14) and a mass spectrometer or an infrared analyzer to measure SF 6 concentration. Neither technique is commercially available for routine measurement. The infrared analyzer has a low signal-to-noise ratio and a response time of 20 ms or more. Ai...