Measurement of Heat Flux Applied from Atmospheric Pressure Plasma Jets to Substrate Using a LiNbO₃ Laser Interferometer

Abstract

We measured the heat flux applied to a Litiumniobate (LiNbO 3 ) substrate using a LiNbO 3 laser interferometer in atmospheric pressure plasma (APPJ). Compared to the consumed energy of the plasma reactor, determined by the V-Q Lissajous figure, the energy input from the APPJ to the LiNbO 3 was approximately 20%.