2000
DOI: 10.1109/16.822266
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Measurement of high-field electron transport in silicon carbide

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Cited by 113 publications
(50 citation statements)
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“…5 In the low field region, the dynamic IV characteristic is linear such that the differential sheet resistance is approximately constant.…”
Section: Theorymentioning
confidence: 99%
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“…5 In the low field region, the dynamic IV characteristic is linear such that the differential sheet resistance is approximately constant.…”
Section: Theorymentioning
confidence: 99%
“…Passivation is achieved using a layer of benzocyclobutene (BCB) diluted in [1,3,5] trimethylbenzene in a 1:1 ratio. 16 The BCB layer is spun onto the substrate and then patterned via photolithography.…”
Section: B Device Fabricationmentioning
confidence: 99%
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“…I-shaped test structure consisting of wide contact/access regions and a thin constriction defined by mesa isolation (of depth 100 nm) was used to investigate the velocity field characteristics (Figure 2). Due to the geometry of this device, the resistance from the ohmic/access regions is significantly lower (at least 14X) than that from the constriction 14,15 . Therefore it can be assumed that entire potential drop and current limiting mechanisms are related to the constriction.…”
mentioning
confidence: 99%
“…Hot-electron properties in 4H-SiC have been studied at high electric fields applied parallel to the basal plane [3,4]. Channel self-heating limits the highest fields in the experimental investigations unless nanosecond voltage pulses are used [5].…”
Section: Introductionmentioning
confidence: 99%