In this paper we propose a new three dimensional semi‐empirical formulae for the deduction of L X‐ray production and ionization cross sections by introducing the dependence on the atomic number of the target, noted as ‘Z‐dependence’. The data are also fitted collectively and separately (for each element) by analytical functions to calculate semi‐empirical cross sections. For this purpose, the corrected ECPSSR model (noted as eCPSSR) and the published experimental data of Lα, Lβ and Lγ X‐ray production and L1, L2 and L3 ionization cross sections in the period (1950–2014) are combined to calculate the semi‐empirical ones for a wide range of elements by proton impact. The semi‐empirical cross sections (for the three x‐rays lines Lα, Lβ, Lγ and the three sub‐shells L1, L2, L3) are then deduced by fitting the available experimental data normalized to their corresponding theoretical values (using the eCPSSR model) giving a better representation of the experimental data for the individual interpolation. At last, a comparison is made between the three semi‐empirical formulae reported in this work. Copyright © 2016 John Wiley & Sons, Ltd.