Measurement of mechanical losses in the carbon nanotube black coating of silicon wafers

Prokhorov, L.; Mitrofanov, V. P.; Kamai, B.; Markowitz, A.; Ni, Xiaoyue; Adhikari, R. X.

doi:10.1088/1361-6382/ab5357

Cited by 3 publications

(1 citation statement)

References 27 publications

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“…One of the main mechanisms of losses is the thermoelastic loss associated with heat flow through the disk as it vibrates. The calculated thermoelastic loss for such a resonator is 27 It can be assumed that the remaining losses were mainly the clamping loss and the surface loss. When an electric voltage was applied to the electrodes, the mode frequency and the decay time were measured in both measurement configurations.…”

Section: Results Of Measurements and Their Discussionmentioning

confidence: 99%

Using silicon disk resonators to measure mechanical losses caused by an electric field

Klochkov

Prokhorov

Matiushechkina

et al. 2022

Review of Scientific Instruments

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Several projects of the next generation gravitational-wave detectors use the high purity monocrystalline silicon test masses. The electric field of the actuator that is applied to correct the position of the silicon test mass causes additional mechanical losses and associated noise. Disk mechanical resonators are widely used to study mechanical losses in multilayer optical coatings that are deposited on the test masses of gravitational-wave detectors. We use silicon disk resonators to study losses caused by an electric field. In particular, the dependence of mechanical losses on the resistivity of silicon is investigated. The resonator is a thin commercial silicon wafer in which a low frequency nodal diameter mode is excited. A DC voltage is applied between the wafer and a nearby electrode. We use two measurement configurations. In the first configuration, the dependence of losses on the resistance in the voltage supply circuit is investigated. The dependence of losses on the resistivity of silicon is investigated in the second configuration. We propose a model that relates the electric field induced mechanical loss in disk resonators to the resistivity of the material. Measurements are carried out for low and high resistivity silicon wafers. The measurement results are compared with calculations. Based on these studies, it is possible to estimate the loss and noise of the test masses of gravitational-wave detectors associated with electrostatic actuators.

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Section: Results Of Measurements and Their Discussionmentioning

confidence: 99%

Using silicon disk resonators to measure mechanical losses caused by an electric field

Klochkov

Prokhorov

Matiushechkina

et al. 2022

Review of Scientific Instruments

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Measurement of the temperature dependence of mechanical losses induced by an electric field in undoped silicon disk resonators

Klochkov

Mitrofanov

2023

Applied Physics Letters

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Test masses of future laser interferometric gravitational-wave detectors will be made of high-purity silicon and cooled, in particular, to 123 K in the LIGO Voyager project. Electrostatic actuators are supposed to be used to tune the test mass position. Capacitive coupling of the actuator electrodes with the silicon test mass results in the mechanical loss caused by electric currents flowing in silicon having a finite resistivity. This loss is a cause of additional thermal noise. In this study, we present the results of temperature dependence of the electric field induced loss in the bending vibration mode of commercial disk-shaped undoped silicon wafers in the temperature range of 100–295 K.

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A 62 Hz high-Q 4-spiral mechanical resonator fabricated of a silicon wafer

Klochkov,

Mitrofanov

2024

Review of Scientific Instruments

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High purity silicon is considered as the test mass material for future cryogenic gravitational-wave detectors, in particular Einstein Telescope-low frequency and LIGO Voyager [(LIGO) Laser Interferometer Gravitational-Wave Observatory]. To reduce the thermal noise of the test masses, it is necessary to study the sources of corresponding losses. Mechanical resonators with frequencies 300 Hz–6 kHz are successfully used for studying, for example, losses in optical coatings of the test mass. However, the frequency range of the interferometric gravitational-wave detectors starts at 10 Hz, and the investigation of different dissipation mechanisms for the test masses in the low-frequency region is relevant. We developed a design of a four-spiral mechanical resonator for studying dissipation and noise in the low frequency range. The resonator was fabricated of a 3-in. silicon wafer using an anisotropic wet etching technique. It consists of four spiral cantilevers on a common base, linked together with additional coupling beams for increasing the frequency difference between the resonator normal modes corresponding to the fundamental flexural off-plane mode of a single spiral cantilever. The measured Q-factor of the 62 Hz out-of-phase mode of the four-spiral silicon resonator at room temperature is limited mainly by the thermoelastic loss. At 123 K, the measured Q = (1.5 ± 0.3) × 107. The main contribution to the total loss comes from clamping and surface losses.

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Measurement of mechanical losses in the carbon nanotube black coating of silicon wafers

Cited by 3 publications

References 27 publications

Using silicon disk resonators to measure mechanical losses caused by an electric field

Using silicon disk resonators to measure mechanical losses caused by an electric field

Measurement of the temperature dependence of mechanical losses induced by an electric field in undoped silicon disk resonators

A 62 Hz high-Q 4-spiral mechanical resonator fabricated of a silicon wafer

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