Measurement of plasma electron temperature and density by  using different applied voltages and working pressures  in a magnetron sputtering system

Mazhir, Sabah N.; Khalaf, Mohammed K.; Taha, Sarah K.; Mohsin, Hussein K .

doi:10.14419/ijet.v7i3.9459

Cited by 7 publications

(5 citation statements)

References 7 publications

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“…In spite of that, at higher pressures, the electron temperature curves for lower applied voltages are somewhat higher than that of high voltages. This behavior is corresponding to the experimental results in very good manner, see for instant [11][12][13]. The effect, therefore, means that the electron temperature decreases as the applied voltage increase.…”

Section: Resultssupporting

confidence: 85%

“…The reason is that the plasma frequency behaves as the electron density in Figure 4. In fact, plasma frequency is directly proportional with it according to Equation (12).…”

Section: Resultsmentioning

confidence: 99%

“…There are rather a few theoretical and experimental researches on the phenomenon of glow electrical discharge. Some of these researches discusses the effect of working pressure and applied voltages on these devices [11][12][13][14]. In this research we proceed to explore the extent to which experimental results are consistent with simulation of the phenomenon using COMSOL Multiphysics program.…”

Section: Introductionmentioning

confidence: 99%

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Investigation in the Effect of Applied Voltage and Working Pressure on Some Plasma Parameters in the Positive Column of Dc Glow Discharge

Jassim¹

2019

IHJPAS

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Comsol multiphysics software is established to make a simulation that is comparable with experimental device. by utilizing comsol, the positive column domain of direct-current glow discharge with argon is considered for both of different applied voltage and working gas pressure. The calculations are exhibited by using a precise collision cross sections and Townsend coefficients for the argon. The impacts of voltage and pressure on the Debye length, number of particles in Debye sphere and plasma frequency are calculated and graphically delineated. With this regard to the dependence of plasma parameters on the applied voltage and pressure, some of them are found to be compatible with the experimental results, while others are not. For example, the calculations of the COMSOL shows that the electron temperature is not always decreasing with the increase in the applied voltage, and the Debye length does not give a linearly decreasing relationship but rather an exponentially decreasing relationship. Also, the calculations do not reproduce and match the experimental results for the dependence electron density on working pressure at various potentials.

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Section: Resultssupporting

confidence: 85%

“…The reason is that the plasma frequency behaves as the electron density in Figure 4. In fact, plasma frequency is directly proportional with it according to Equation (12).…”

Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Investigation in the Effect of Applied Voltage and Working Pressure on Some Plasma Parameters in the Positive Column of Dc Glow Discharge

Jassim¹

2019

IHJPAS

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“…This is due to the presence of energetic electrons associated with the enhancement of the electric field in the gap. As a consequence, there is an increase in the relative concentration/intensity of the excited neutral atoms and molecules [ 40 , 49 ]. That is in agreement with the previously reported argon emission line of DBD plasma [ 48 , 50 ].…”

Section: Resultsmentioning

confidence: 99%

Thin Film Deposition by Atmospheric Pressure Dielectric Barrier Discharges Containing Eugenol: Discharge and Coating Characterizations

et al. 2020

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Eugenol (4-Allyl-2-methoxyphenol) is the main constituent of clove oil. In addition to being widely used as a condiment, it has been recognized as a powerful bactericide. Owing to that, Eugenol has been used in several applications including odontology and as a conservative for food products. Aiming at the development of natural bactericide coatings, in this work, using an atmospheric pressure plasma in a dielectric barrier discharge (DBD) reactor Eugenol was deposited on stainless steel substrate, with argon as a carrier gas. The discharge power supply was a transformer at 14.4 kV peak-to-peak voltage and 60 Hz frequency. Operating with a gas flow rate at 4 L/min, the active power was around 1.2 W. The maximum plasma electron temperature of the plasma with monomers was about 1.5 eV, estimated by visible emission spectroscopy using a local thermodynamic equilibrium approach. The study also comprehended the analysis of the film structure, aging, and thermal stability using infrared reflectance spectroscopy, and its thicknesses and roughness by profilometry. The thickness of the films was in the range of 1000 to 2400 nm with a roughness of up to 800 nm with good adhesion on the substrate. The FTIR result shows a stable coating with a chemical structure similar to that of the monomer. Aging analysis showed that the film does not degrade, even after exposing the film for 120 days in ambient air and for 1.0 h under a high thermal UV-lamp.

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“…The atoms on the target material's outer surface are sputtered outward when they receive enough energy to break their bonds with nearby atoms. Through a super-clean environment created by the vacuum pump, the sputtered atoms travel toward the surface of the substrate that is placed on the substrate holder [109,112,113].…”

Section: Magnetron Sputteringmentioning

confidence: 99%

Coatings Functionalization via Laser versus Other Deposition Techniques for Medical Applications: A Comparative Review

et al. 2022

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The development of new biological devices in response to market demands requires continuous efforts for the improvement of products’ functionalization based upon expansion of the materials used and their fabrication techniques. One viable solution consists of a functionalization substrate covered by layers via an appropriate deposition technique. Laser techniques ensure an enhanced coating’s adherence to the substrate and improved biological characteristics, not compromising the mechanical properties of the functionalized medical device. This is a review of the main laser techniques involved. We mainly refer to pulse laser deposition, matrix-assisted, and laser simple and double writing versus some other well-known deposition methods as magnetron sputtering, 3D bioprinting, inkjet printing, extrusion, solenoid, fuse-deposition modeling, plasma spray (PS), and dip coating. All these techniques can be extended to functionalize surface fabrication to change local morphology, chemistry, and crystal structure, which affect the biomaterial behavior following the chosen application. Surface functionalization laser techniques are strictly controlled within a confined area to deliver a large amount of energy concisely. The laser deposit performances are presented compared to reported data obtained by other techniques.

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Measurement of plasma electron temperature and density by using different applied voltages and working pressures in a magnetron sputtering system

Cited by 7 publications

References 7 publications

Investigation in the Effect of Applied Voltage and Working Pressure on Some Plasma Parameters in the Positive Column of Dc Glow Discharge

Investigation in the Effect of Applied Voltage and Working Pressure on Some Plasma Parameters in the Positive Column of Dc Glow Discharge

Thin Film Deposition by Atmospheric Pressure Dielectric Barrier Discharges Containing Eugenol: Discharge and Coating Characterizations

Coatings Functionalization via Laser versus Other Deposition Techniques for Medical Applications: A Comparative Review

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