Measurement of the Aspherical Optical Surfaces with the Improved Phase Retrieval

Abstract

In order to verify the estimated wave-front ability of the phase retrieval, a method utilized in the measurement of the aspherical optical surfaces using the phase retrieval technology is described. This technique is based on the algorithm as a solution for the measurement of the aspherical optical surfaces, whose principle is sampling a number of the given defocus images and obtaining the phase information by solving the wave-front with Fourier optical diffractive theory and mathematics optimization. We set up an experimental arrangement used to measure the aspherical optical surfaces using the improved phase retrieval. In addition, we introduced the method of optical alignment in detail, which is very important for high-precision measurements. We obtained an agreement among the error distributions, the peak value, and the root-mean-square value of a ZYGO interferometer, which demonstrates that the improved phase retrieval method can effectively estimate the wave-front and the aberrations of aspherical optical surfaces.

Research on Optical Metrology for Complex Optical Surfaces with Focal Plane Wavefront Sensing

“…In this paper, on the basis of FPWS and algorithm research in the earlier stage [ 19 , 20 ], we will not repeat the detailed research conducted on the FPWS principle, algorithms, and improvement and only simplify and introduce the principle of PR. In order to verify the testing capability of PR technology on complex optical surfaces, an experimental platform for testing different types of surfaces based on modified PR (MPR) was built.…”