The technique for measuring the diffusion coefficients of reactive atomic species through their radiative recombination reactions is applied to multicomponent mediums. A series of diffusion coefficients of chlorine atoms in chlorine molecules mixed with rare gases M(He, Ne, Ar, Kr, and Xe) were measured for various Cl2 and M mole fractions. By extrapolating to zero molecular chlorine pressure, the diffusion coefficients of chlorine atoms in rare gases were obtained. The measured values of the diffusion constant are DCl–He =0.75±0.12, DCl–Ne =0.32±0.05, DCl–Ar =0.19±0.03, DCl–Kr =0.14±0.02, and DCl–Xe =0.12±0.02 cm2/s, respectively, at 296 K and 1 atm rare gas pressure. The corresponding hard sphere collision diameter of chlorine atoms in rare gases was calculated and a comparison was made between the diffusion coefficients of Cl–rare gas and Ar–rare gas systems at 296 K.