2009
DOI: 10.1088/1367-2630/11/5/053013
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Measurement of the lattice parameter of a silicon crystal

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Cited by 55 publications
(50 citation statements)
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“…The WASO04 crystal was grown and purified by application of the float-zone technique by Wacker Siltronic in January 1995. It was doped with nitrogen to prevent precipitation of vacancies and self-interstitials; detailed information about the crystal characterization can be found in [8,11]. The homogeneity of its lattice parameter was investigated by the PTB and NIST [12,13].…”
Section: Lattice Parameter Of the Waso04 Crystalmentioning
confidence: 99%
“…The WASO04 crystal was grown and purified by application of the float-zone technique by Wacker Siltronic in January 1995. It was doped with nitrogen to prevent precipitation of vacancies and self-interstitials; detailed information about the crystal characterization can be found in [8,11]. The homogeneity of its lattice parameter was investigated by the PTB and NIST [12,13].…”
Section: Lattice Parameter Of the Waso04 Crystalmentioning
confidence: 99%
“…The surface damage produced by grinding was removed by a variant of the well known cupric ion process used for polishing Si wafers. Detailed information about the crystal characterization is given by Massa, Mana, Kuetgens et al (2009).…”
Section: Experimental Apparatusmentioning
confidence: 99%
“…Two Xray/optical interferometers specimens were cut from the 87 cm position of the ingot, and absolute lattice spacing measurements were performed at INRIM using a significantly improved apparatus. The displacement of the movable crystal was extended to 5 cm with nanoradian alignment and nanometer straightness [32,33]. The results from the two interferometers were in excellent agreement, with a relative uncertainty of 5 × 10 −9 , which is nearly an order of magnitude more accurate than earlier lattice parameter measurements.…”
Section: Standard Crystalsmentioning
confidence: 70%
“…W04 d220 = 192.015 570 2(10) × 10 −12 m at 22.5 °C and 0 Pa (vacuum) [4,32,33]. The X-ray/optical interferometer measurements were performed near 22.5 °C and at 0 Pa. Corrections to account for small deviation from 22.5 °C are described later in this section.…”
Section: Standard Crystalsmentioning
confidence: 99%