The first part of this chapter comprises setups and results of the determination of wavefront and beam parameters for different EUV sources (free-electron lasers, HHG-sources, synchrotron radiation) by self supporting Hartmann-Sensors. We present here i.a. a sensor applied for alignment of the ellipsodial mirror at FLASH beamline 2, yielding a reduction of the rms-wavefront aberrations by more than a factor of 3. In the second part we report on the characterization of the Free-Electron-Laser FLASH at DESY by a quantitative determination of the Wigner distribution function. The setup, comprising an ellipsodial mirror and a moveable extreme UV sensitive CCD detector, enables the mapping of two-dimensional phase space corresponding to the horizontal and vertical coordinate axes, respectively. Furthermore, an extended setup utilizing a torodial mirror for complete 4D-Wigner reconstruction has been accomplished and tested using radiation from a multimode Nd:VO4 laser.