2015
DOI: 10.1088/0957-4484/26/19/195706
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Measurement of thin film thermal conductivity using the laser flash method

Abstract: Abstract.We present a method to measure the in-plane thermal conductivity of thin films by the laser flash technique. The method uses a well-defined structure for the analysis. We have realised the structure by conformal deposition of ZnO films of different thicknesses using atomic layer deposition onto a 20 µm thick ion track etched polycarbonate membrane as substrate. By using this procedure we could determine the thermal conductivity of the deposited thin film from the total thermal diffusivity of the nanoc… Show more

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Cited by 37 publications
(19 citation statements)
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References 27 publications
(44 reference statements)
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“…The error of the TC measurements was estimated from contributions of the density, diffusivity, and specific heat measurement errors (a 3 % error for the DSC measurements was used). This error is estimated to be 7 % for the equipment used, which is generally in agreement with an uncertainty of 8 % for a single TC measurement given by Ruoho et al [18].…”
Section: Measurements and Calculations Of Thermal Propertiessupporting
confidence: 89%
“…The error of the TC measurements was estimated from contributions of the density, diffusivity, and specific heat measurement errors (a 3 % error for the DSC measurements was used). This error is estimated to be 7 % for the equipment used, which is generally in agreement with an uncertainty of 8 % for a single TC measurement given by Ruoho et al [18].…”
Section: Measurements and Calculations Of Thermal Propertiessupporting
confidence: 89%
“…no lateral heat loss). The testing sample is usually prepared by spraying a layer of graphite on both sides to act as an absorber on the front side and as an emitter on the rear side for temperature sensing [67]. The rear-side infrared radiation thermometer should be fast enough to respond to the emitting signals, and the precision of temperature calibration is usually ± 0.2 K [53].…”
Section: Laser Flash Methods For Thermal Diffusivitymentioning
confidence: 99%
“…The methods with transient or periodic sample heating [9], are also used for the determination of thermal parameters. Among them the main ones are the 3ω method [10], the laser flash method [11], photoacoustic (PA) technique with piezoelectric [12,13] and gasmicrophone (GM) registration configurations.…”
Section: Introductionmentioning
confidence: 99%