Different oxidation states of titanium nitride thin films, including pure TiN(h 0 0), TiN 1−x O x (h 0 0), Ti 2 O 3 (0 0 l) and pure anatase TiO 2 (0 0 l), were prepared by pulsed laser deposition with various oxygen pressures (P O 2) using a TiN target. Elaborative evolutions of the crystal and electronic structures of the obtained films were examined systematically by x-ray diffraction and x-ray absorption spectroscopy. We found that the Ti 2 O 3 (0 0 l) film, which was prepared at oxygen pressures P O 2 = 10 −4 Torr, exhibited the maximum room temperature ferromagnetism (RTFM) behaviour. The bound magnetic polaron model is used to clarify the origin of RTFM in these films.