2004
DOI: 10.1016/j.vacuum.2003.12.017
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Measurements of the relative momentum accommodation coefficient for different gases with a viscosity vacuum gauge

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Cited by 31 publications
(12 citation statements)
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“…The former is based on the work by Gronych et al (2004), who have conducted experiments to find out that the tangential momentum accommodation coefficient increases as the molecular weight of the gas decreases. This may be related to the influence of gas species.…”
Section: Tablementioning
confidence: 99%
“…The former is based on the work by Gronych et al (2004), who have conducted experiments to find out that the tangential momentum accommodation coefficient increases as the molecular weight of the gas decreases. This may be related to the influence of gas species.…”
Section: Tablementioning
confidence: 99%
“…In most macroscopic applications, TMAC is generally assumed to be unity, expressing diffusive reflection on the surfaces. While in many higher Kn experiments [9][10][11][12][13][14][15][16] and molecular dynamics (MD) simulations [17][18][19][20][21][22][23][24][25], the TMAC was reported to be always less than unity. For a variety of gases (mostly noble gases) on metals, semiconductors, or even glass surfaces, the TMAC may be impacted by many factors, such as gas and wall materials [9][10][11][12][13][14][15][16][20][21][22][23][24], incident gas angle and energy [9,11,[17][18][19]21], surface roughness [23], wall temperature [9,11,[17][18][19][21][22][23] and adsorbed layers or gas molecules adsorption [13,…”
Section: Introductionmentioning
confidence: 99%
“…Note that it can be easily checked that, for a flat wall (i.e. for an interaction potential V(x, z) = V(z)), the boundary conditions (16) reduces to the classical specular reflection.…”
Section: New Boundary Conditions For the Boltzmann Equationmentioning
confidence: 99%
“…Then, as we indicated above, for a flat wall the boundary condition is the usual specular reflection. For a periodic rough wall the boundary condition introduced in 4 is given by (16)(17).…”
Section: Implementation Of Mlbc In a Dvm Contextmentioning
confidence: 99%