2008
DOI: 10.1117/12.780816
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Measuring near-field optical distributions emitted from chip surface of photonic crystal patterned light emitting diodes

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“…The near-field scanning optical microscope (NSOM) is a high resolution imaging tool used in measuring both the surface profile and the near-field optical signal of a sample, and thus has been widely used in such research fields as the measurement of micro/nanophotonic devices, [1][2][3][4][5][6][7] plasmonic devices, 8,9 semiconductor devices, [10][11][12] and biomaterials, [13][14][15][16] etc. In addition, it plays an important role in the field of nanolithography.…”
Section: Introductionmentioning
confidence: 99%
“…The near-field scanning optical microscope (NSOM) is a high resolution imaging tool used in measuring both the surface profile and the near-field optical signal of a sample, and thus has been widely used in such research fields as the measurement of micro/nanophotonic devices, [1][2][3][4][5][6][7] plasmonic devices, 8,9 semiconductor devices, [10][11][12] and biomaterials, [13][14][15][16] etc. In addition, it plays an important role in the field of nanolithography.…”
Section: Introductionmentioning
confidence: 99%