2022
DOI: 10.3390/nano12132220
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Measuring Non-Destructively the Total Indium Content and Its Lateral Distribution in Very Thin Single Layers or Quantum Dots Deposited onto Gallium Arsenide Substrates Using Energy-Dispersive X-ray Spectroscopy in a Scanning Electron Microscope

Abstract: The epitaxial deposition of a precise number, or even fractions, of monolayers of indium (In)-rich semiconductors onto gallium arsenide (GaAs) substrates enables the creation of quantum dots based on InAs, InGaAs and indium phosphide (InP) for infrared light-emitting and laser diodes and the formation of indium antimonide (InSb)/GaAs strained layer superlattices. Here, a facile method based on energy-dispersive X-ray spectroscopy (EDXS) in a scanning electron microscope (SEM) is presented that allows the indiu… Show more

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Cited by 5 publications
(2 citation statements)
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“…The width of the interaction volume for the X-ray generation of 15 kV electrons within matter was of the order of about 1 µm for GaAs and was similar for many transition metals. The X-ray detector was a 30 mm 2 Bruker X-Flash430 SDD (Bruker Nano Analytics, Berlin, Germany) mounted at a take-off angle of 22 • and equipped with an AP3.3 ultra-thin polymer window (MOXTEK, Inc., Orem, UT, USA) [32]. Bruker's Quantax70 software was used to acquire and analyze spectrum images that store complete X-ray data at 10 eV spectral resolution for each of the 640 × 480 data points.…”
Section: Methodsmentioning
confidence: 99%
“…The width of the interaction volume for the X-ray generation of 15 kV electrons within matter was of the order of about 1 µm for GaAs and was similar for many transition metals. The X-ray detector was a 30 mm 2 Bruker X-Flash430 SDD (Bruker Nano Analytics, Berlin, Germany) mounted at a take-off angle of 22 • and equipped with an AP3.3 ultra-thin polymer window (MOXTEK, Inc., Orem, UT, USA) [32]. Bruker's Quantax70 software was used to acquire and analyze spectrum images that store complete X-ray data at 10 eV spectral resolution for each of the 640 × 480 data points.…”
Section: Methodsmentioning
confidence: 99%
“… Back-scattered electron SEM image in plan-view or top-down geometry (black & white) with overlaid X-ray map (coloured inset; blue represents Ga and yellow In L-line intensities) of nominally 1.5 ML InAs on GaAs(001). Reproduced from [ 30 ]. …”
Section: Figurementioning
confidence: 99%